Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application

Abstract

The design and fabrication of a Micro-electromechanical Systems (MEMS)-based tilted microcoil on a polyimide capillary are reported in this paper, proposed for an electromagnetically-driven single-fiber endoscope scanner application. The parameters of the tilted microcoil were optimized by simulation. It is proved that the largest driving force could be achieved when the tilt-angle, the pitch and the coil turns of the designed microcoil were 60°, 80 µm and 20, respectively. The modal simulation of the designed fiber scanner was carried out. The prototypes of the tilted microcoils were fabricated on the surface of polyimide capillary with 1 mm-diameter using our developed cylindrical projection lithography system. The dimensions of the two tilted microcoils were as follows: one was tilt-angle 45°, line width 10 ± 0.2 µm, coil pitch 78.5 ± 0.5 µm, and the other was tilt-angle 60°, line width 10 ± 0.2 µm, coil pitch 81.5 ± 0.5 µm. Finally, a direct mask-less electroplating process was employed to fabricate the copper microcoil with 15 µm thickness on the gold (Au) seed-layer, and the corresponding line width was expanded to 40 µm.

Optical-Mechanical Configuration of Imaging Operation for Endoscopic Scanner: A Review

“…However, this often causes the large dimension of the endoscopic scanner. Cylindrical projection lithography [46] was proposed for manufacturing microstructures on surfaces as micro components. The manufacturing process is complex, but a smaller scanning probe is possible.…”

Editorial for the Special Issue on MEMS Technology for Biomedical Imaging Applications

“…Qiu et al presented a review of the advancements of MEMS actuators for optical microendoscopy, including optical coherence tomography, optical resolution photoacoustic microscopy, confocal, multiphoton, and fluorescence wide-field microendoscopy [7]. The work of Yang et al provided an ultra-thin single-fiber scanner that was electromagnetically driven by a tilted microcoil on a polyimide capillary [8].…”