2009
DOI: 10.1007/s10853-009-3528-2
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Fabrication of epitaxial nanostructured ferroelectrics and investigation of their domain structures

Abstract: Nanostructured ferroelectrics are important objects for studies on ferroelectric size effects as well as for applications to memory devices with ultra-high memory density. In the present article, we introduce several approaches for the synthesis of confined ferroelectrics with sizes in and below the hundreds of nanometer range, including top-down processes like e-beam lithography, self-assembly methods like chemical solution deposition, and growth by pulsed laser deposition using stencil masks. Furthermore, th… Show more

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Cited by 20 publications
(18 citation statements)
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“…This realization has led to patterning methods to create PZT islands [28][29][30] or bilayers [ 31 ] to partially release ferroelastic fi lms from the substrate's mechanical constraint. Although such methods increase electric-fi eld-driven 90 ° domain wall mobility relative to that of continuous, single-layer PZT fi lms, they are insuffi cient for probing the fundamental mobility of ferroelastic domains in thin fi lms and its relation to nanoscale materials features such as point defects, grain boundaries, and fi lm surface/interface features.…”
Section: Introductionmentioning
confidence: 99%
“…This realization has led to patterning methods to create PZT islands [28][29][30] or bilayers [ 31 ] to partially release ferroelastic fi lms from the substrate's mechanical constraint. Although such methods increase electric-fi eld-driven 90 ° domain wall mobility relative to that of continuous, single-layer PZT fi lms, they are insuffi cient for probing the fundamental mobility of ferroelastic domains in thin fi lms and its relation to nanoscale materials features such as point defects, grain boundaries, and fi lm surface/interface features.…”
Section: Introductionmentioning
confidence: 99%
“…There have been many efforts to fabricate and analyze individually addressable nanoscale ferroelectric capacitors. [4][5][6][7][8][9][10][11][12] Several different fabrication methods such as chemical solution deposition, focused ion-beam ͑FIB͒, and e-beam lithography have been used for ferroelectric nanostructure fabrication. [6][7][8][9][10][11][12][13][14][15] FIB has been almost exclusively used to fabricate ferroelectric capacitors.…”
Section: Introductionmentioning
confidence: 99%
“…Recently we reported an anodic aluminum oxide ͑AAO͒-based fabrication method which can be easily applied to fabricate nanoscale ferroelectric capacitors and structures without any significant detrimental effects. 6,8 This AAO-based fabrication method is a unique approach for the high quality fabrication of nanostructures and the subsequent solvent-free lift-off process is suitable for even very sensitive materials. 6 Therefore, this approach may give us reliable access to smaller capacitors than conventional approaches such as FIB or e-beam lithography.…”
Section: Introductionmentioning
confidence: 99%
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“…A general theoretical approach concerning the properties of ferroelectrics in the nanoscale is framed by Eliseev and Morovoska [11]. The synthesis of ferroelectric nanocubes and epitaxial nanostructures are discussed by Wada et al [12] and Han et al [13]. Piezoresponse Force Microscopy (PFM) has been proven to be an invaluable tool to understand the properties of ferroelectrics in the nanoscale.…”
mentioning
confidence: 99%