Fabrication of Freestanding SiO$_{2}$-Membrane Systems for Thermo-Optic Adjusting of SOI Photonic Wires

Amthor, J.; Horn, O.; Lipka, T.; Savov, Angel; Müller, Jörg

doi:10.1109/lpt.2011.2157909

Cited by 5 publications

(2 citation statements)

References 6 publications

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“…The experimental results are in close agreement with the FEM-simulations. A further reduction of the energy consumption employing the same heaters can be realized by a local removal of the silicon substrate which acts as a heat sink [48], [49]. The total power consumption for the active NU compensation of all eight MRRs within the devices are analyzed for two realistic, although, still simplified scenarios.…”

Section: Thermo-optic Effect and Static Power Consumptionmentioning

confidence: 99%

Energy-Efficient Wavelength Multiplexers Based on Hydrogenated Amorphous Silicon Resonators

et al. 2015

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Optical multiplexers are key components of modern data transmission systems that have evolved from long-haul fiber communication applications down to the photonic interconnect level on-chip, which demand high bandwidths and low-power photonic links with small footprint. We present compact, energy-efficient, and high-bandwidth optical add/drop multiplexers that are based on complementary metal-oxide-semiconductor (CMOS) backendcompatible hydrogenated amorphous silicon microring resonators. We study the manufacturing nonuniformity of the as-fabricated devices and analyze the static power consumption that is required to actively align the multiplexers to a 100-GHz grid by using state-of-the-art microheaters. The microring filter banks are in excellent agreement with the design and satisfy a good tradeoff between concurrent properties of high-data-rate capability, low filter loss, high channel isolation, and manufacturing uniformity, which facilitates the operation with low static power consumption. In addition, we demonstrate that it is possible to permanently correct the unavoidable fabrication imperfections and to arrange the individual wavelength channels by a postfabrication trimming method so that the static power is reduced by more than an order of magnitude and allows minimization of these parts of the overall power requirements of such photonic integrated circuits down to record low metrics of a few femtojoules per bit.

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Section: Thermo-optic Effect and Static Power Consumptionmentioning

confidence: 99%

Energy-Efficient Wavelength Multiplexers Based on Hydrogenated Amorphous Silicon Resonators

et al. 2015

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“…However, due to fabrication tolerances, the targeted channel peak positions do not exactly fit the design parameters and a post-fabrication tuning of the resonators will be required to actually meet ITU-grid specifications and either a passive and permanent trimming, 34,35 or an active tuning of the individual resonators will be required, which can be achieved with low powers of a few milliwatt by applying efficient thermal heaters. 36 …”

Section: Four-channel Racetrack-based Wavelength-division Multiplexinmentioning

confidence: 99%

Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon

et al. 2013

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Low-loss hydrogenated amorphous silicon is employed for the fabrication of various planar integrated travelling wave resonators. Microring, racetrack, and disk resonators of different dimensions were fabricated with CMOScompatible processes and systematically investigated. The key properties of notch filter ring resonators as extinction ratio, Q-factor, free spectral range, and the group refractive index were determined for resonators of varying radius, thereby achieving critically coupled photonic systems with high extinction ratios of about 20 dB for both polarizations. Racetrack resonators that are arranged in add/drop configuration and high quality factor microdisk resonators were optically characterized, with the microdisks exhibiting Q-factors of greater than 100000. Four-channel add/drop wavelength-division multiplexing filters that are based on cascaded racetrack resonators are studied. The design, the fabrication, and the optical characterization are presented.

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WDM-filters fabricated with hydrogenated amorphous silicon ring and racetrack resonators

Lipka

Amthor

Müller

2013

2013 Conference on Lasers &Amp; Electro-Optics Europe &Amp; International Quantum Electronics Conference CLEO EUROPE/IQEC

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Fabrication of Freestanding SiO$_{2}$-Membrane Systems for Thermo-Optic Adjusting of SOI Photonic Wires

Cited by 5 publications

References 6 publications

Energy-Efficient Wavelength Multiplexers Based on Hydrogenated Amorphous Silicon Resonators

Energy-Efficient Wavelength Multiplexers Based on Hydrogenated Amorphous Silicon Resonators

Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon

WDM-filters fabricated with hydrogenated amorphous silicon ring and racetrack resonators

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