Large-scale integrated silicon photonic circuits suffer from two inevitable issues that boost the overall power consumption. First, fabrication imperfections even on sub-nm scale result in spectral device non-uniformity that require fine-tuning during device operation. Second, the photonic devices need to be actively corrected to compensate thermal drifts. As a result significant amount of power is wasted if no athermal and wavelength-trimmable solutions are utilized. Consequently, in order to minimize the total power requirement of photonic circuits in a passive way, trimming methods are required to correct the device inhomogeneities from manufacturing and athermal solutions are essential to oppose temperature fluctuations of the passive/active components during run-time. We present an approach to fabricate CMOS backend-compatible and athermal passive photonic filters that can be corrected for fabrication inhomogeneities by UV-trimming based on low-loss amorphous-SOI waveguides with TiO2 cladding. The trimming of highly confined 10 μm ring resonators is proven over a free spectral range retaining athermal operation. The athermal functionality of 2nd-order 5 μm add/drop microrings is demonstrated over 40°C covering a broad wavelength interval of 60 nm.

Abstract. The precise detection of chemicals and biomolecules is of great interest in the areas of biotechnology and medical diagnostics. Thus, there is a need for highly sensitive, small area, and low-cost sensors. We fabricated and optically characterized hydrogenated amorphous silicon photonic resonators for label-free lab-on-chip biosensors. The sensing was performed with small-footprint microdisk and microring resonators that detect a refractive-index change via the evanescent electric field. Homogeneous sensing with NaCl and surface-sensing experiments with immobilized bovine serum albumin (BSA) were carried out. A sensitivity as high as 460 nm∕RIU was measured for NaCl dissolved in deionized water for the disk, whereas about 50 nm∕RIU was determined for the ring resonator. The intrinsic limits of detection were calculated to be 3.3 × 10 −4 and 3.2 × 10 −3 at 1550-nm wavelength. We measured the binding of BSA to functionalized ring resonators and found that molecular masses can be detected down to the clinically relevant femtogram regime. The detection and quantification of related analytes with hydrogenated amorphous silicon photonic sensors can be used in medical healthcare diagnostics like point-of-care-testing and biotechnological screening. © The Authors.Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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A method to compensate for fabrication tolerances and to fine-tune individual photonic circuit components is inevitable for wafer-scale photonic systems even with most-advanced CMOS-fabrication tools. We report a cost-effective and highly accurate method for the permanent trimming of hydrogenated amorphous silicon photonic devices by UV-irradiation. Microring resonators and Mach-Zehnder-interferometers were utilized as photonic test devices. The MZIs were tuned forth and back over their complete free spectral range of 5.5 nm by locally trimming the two MZI-arms. The trimming range exceeds 8 nm for compact ring resonators with trimming accuracies of 20 pm. Trimming speeds of ≥ 10 GHz/s were achieved. The components did not show any substantial device degradation.

This paper reports about hydrogenated amorphous silicon which can be employed as low-loss optical material for small footprint and cost-effective photonic integrated circuits. Basic waveguides, photonic wire based couplers, Mach-Zehnder interferometers, ring resonators and Mach-Zehnder assisted ring resonators were designed, fabricated, and optically characterised. The propagation loss of rib and photonic wire waveguides were determined to be 2 dB/cm and 5.3 dB/cm, respectively. The 90 • bending losses of 5 µm curved photonic wires were determined to be 0.025 dB/90 •. Three-dimensional tapers, which were fabricated without additional etching steps and were deposited on top of the fabricated photonic wires showed a net coupling loss of 4 dB/port. Multimode 3 dB-splitters were systematically investigated resulting in 49-51% splitting ratios. Mach-Zehnder interferometers that were realised with these splitters showed interference fringe depths of up to 25 dB for both polarisations. Compact ring resonators with 10 µm radius implemented as notch filters and in Mach-Zehnder coupled configurations provided extinction ratios of ≥20 dB and Q-factors up to 7500.