2013
DOI: 10.1063/1.4822053
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Fabrication of high anti-reflection nanowires on silicon using two-stage metal-assisted etching

Abstract: In this paper, a novel two-stage metal-assisted etching (MAE) method is proposed for the fabrication of a high anti-reflection silicon nanowire array. In the first stage of etching, a high-concentration etchant is implemented in a short etching time to enable the uniform and complete deposition of coniferous-like silver on the wafer surface. Following the first stage, a low-concentration etchant for producing a vertical and uniform silicon nanowire array is processed in a relatively long etching time. Experime… Show more

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Cited by 4 publications
(4 citation statements)
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“…Numerous techniques have been experimented to obtain silicon nanostructures either in a bottom-up scheme or top-down scheme. Among recent developments, the metal-assisted chemical etching (MCAE) presents as an efficient and low-cost technique for various Si nanostructures such as Si Nanowires (SINWs) [108], porous SiNWs, and Si nanopores [109]. This approach has been effectively used for fabricating large-area silicon nanowires arrays and reported to have increased absorption of incident light and light scattering [110].…”
Section: Silicon-based Nanomaterialsmentioning
confidence: 99%
“…Numerous techniques have been experimented to obtain silicon nanostructures either in a bottom-up scheme or top-down scheme. Among recent developments, the metal-assisted chemical etching (MCAE) presents as an efficient and low-cost technique for various Si nanostructures such as Si Nanowires (SINWs) [108], porous SiNWs, and Si nanopores [109]. This approach has been effectively used for fabricating large-area silicon nanowires arrays and reported to have increased absorption of incident light and light scattering [110].…”
Section: Silicon-based Nanomaterialsmentioning
confidence: 99%
“…A Si nanowire array can thus be produced through successive reduction and oxidation (redox) reactions. We used a two-stage MAE to enable the fabrication of a uniform SNA [22,23]. First, we conducted a short-time MAE using a high-concentration AgNO 3 to produce a silver layer on the surface of the KOH-etched micropyramid array.…”
Section: Qd/simentioning
confidence: 99%
“…It has been reported [27] that the antireflectivity of a nanosilicon substrate is closely proportional to nanowire length. Therefore, the second-stage processing time was set at 5 min to further investigate the antireflectivity of the micronanohybrid structure.…”
Section: Cell Fabrication and Photoelectric Conversion Efficiencymentioning
confidence: 99%