Fabrication of high-frequency pMUT arrays on silicon substrates

Pedersen, Thomas; Zawada, Tomasz; Hansen, Karsten; Lou-Moeller, Rasmus; Thomsen, Erik Vilain

doi:10.1109/tuffc.2010.1566

Cited by 18 publications

(8 citation statements)

References 12 publications

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“…Arrays with high element density, small element size and high resonant frequency are easy to realize by MUT [1,2,3]. Moreover, the MUT array and external circuit can be integrated in a chip.…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Ren

Fan

et al. 2017

Sensors

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A square piezoelectric composite diaphragm was analyzed by the finite element method to enhance the sensitivity of a piezoelectric micromachined ultrasound transducer (pMUT). The structures of electrode and piezoelectric film were optimized and a centric electrode was designed to avoid the counteraction of stress in the centre and edges. In order to further improve the sensitivity; a pMUT with partially-etched piezoelectric film was adopted. The receive and transmit sensitivities of the pMUT were analyzed in details. The receive sensitivity of pMUT with partially-etched ZnO film is 3.3 dB or 6.8 dB higher than those with a centric and whole electrode, respectively; and the amplitude of a partially-etched ZnO film pMUT under a certain voltage is 5.5 dB and 30 dB higher than those with centric and whole electrode separately. Two pMUT-based ZnO films were fabricated by micromachining technology and their receive and transmit sensitivities were tested. The ZnO films deposited by direct current (DC) magnetron sputtering exhibit a densely packed structure with columnar crystallites. The test results show that the structure of the square diaphragm with partially-etched piezoelectric layer can significantly improve the transducer sensitivity. The receive sensitivity and transmit sensitivity are −238.35 dB (ref. 1 V/μPa) and 150.42 dB (ref. 1 μPa/V); respectively.

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Section: Introductionmentioning

confidence: 99%

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Ren

Fan

et al. 2017

Sensors

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“…As a important functional materials, Pb(Zr 0.48 Ti 0.52 )O 3 (PZT) films have been widely used in micro acoustic sensor, non-volatile memory, uncooled infrared detectors for their excellent ferroelectric, piezoelectric, pyroelectric properties [1][2][3][4]. The study has shown that the properties of PZT films depend greatly on their orientation.…”

Section: Introductionmentioning

confidence: 99%

Effect of Annealing Process on Properties of Pb(Zr_0.52Ti_0.48)O₃Thin Films Prepared by Sol-Gel Method

Li¹,

Wang²,

Liu³

et al. 2013

Ferroelectrics

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The effect of the annealing process on properties of Pb (Zr 0.48 Ti 0.52 )O 3 (PZT) thin films prepared by sol-gel method was systematically studied. PZT film deposited by the single layer pre-crystallization processing followed by multilayer crystallization processing is easy to grow along (110) orientation. The PZT films were prepared by the single layer annealing process and show (100) preferred orientation at lower crystallization temperature, while (111) and (110) orientation growth is occurs easily in higher the crystallization temperature. The PZT films deposited at higher crystallization temperature have larger average grain, but the high temperature cause the volatilization of lead, film density to decrease.

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“…Driven not only by applications in the audio field but most importantly by biomedical and underwater ultrasound applications and requirements, the piezoelectric micro ultrasonic transducer (pMUT) has been widely described in [13][14][15][16][17]. The fabrication details are by now well established together with their performance characteristics.…”

Section: Introductionmentioning

confidence: 99%

Characterization and Modelling of Circular Piezoelectric Micro Speakers for Audio Acoustic Actuation

Mendoza-López

Sánchez-Solano

Huertas-Díaz

2012

ISRN Mechanical Engineering

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A study of circular piezoelectric micro speakers is presented for applications in the audio frequency range, including values for impedance, admittance, noise figures, transducer gain, and acoustic frequency responses. The micro speakers were modelled based on piezoelectric micro ultrasonic transducer (pMUT) design techniques and principles. In order to reach the audio frequency range, transducer radii were increased to the order of one centimetre, whilst piezoelectric layer thicknesses ranged the order of several μm. The micro actuators presented might be used for a variety of electroacoustic applications including noise control, hearing aids, earphones, sonar, and medical diagnostic ultrasound. This work main contribution is the characterization of the design space and transducer performance as a function of transducer radius, piezoelectric layer thickness, and frequency range, looking towards an optimized fabrication process.

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Fabrication of high-frequency pMUT arrays on silicon substrates

Cited by 18 publications

References 12 publications

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Effect of Annealing Process on Properties of Pb(Zr_0.52Ti_0.48)O₃Thin Films Prepared by Sol-Gel Method

Characterization and Modelling of Circular Piezoelectric Micro Speakers for Audio Acoustic Actuation

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Fabrication of high-frequency pMUT arrays on silicon substrates

Cited by 18 publications

References 12 publications

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Effect of Annealing Process on Properties of Pb(Zr0.52Ti0.48)O3Thin Films Prepared by Sol-Gel Method

Characterization and Modelling of Circular Piezoelectric Micro Speakers for Audio Acoustic Actuation

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Effect of Annealing Process on Properties of Pb(Zr_0.52Ti_0.48)O₃Thin Films Prepared by Sol-Gel Method