“…These elements are widely used in various industrial and scientific applications. To date, the following main methods for the formation of diffractive elements with a structured surface can be distinguished, which are most common in industrial practice: photolithographic technology [1][2][3][4][5], interference holographic method [6,7], diamond turning technology [8][9][10] and scanning one-or multi-spot direct laser writing on thin films without photoresist [11][12][13][14]. To form a given microrelief structure on metal films deposited on an optical substrate, as a rule, photolithographic technology is actively used.…”