1995
DOI: 10.1364/ao.34.001041
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Fabrication of large-core, high-Δ optical waveguides in polymers

Abstract: The realization of polymer optical waveguides that have a large core size and high refractive-index difference (LCHD) Δ transmission characteristics is presented. A fabrication procedure for the waveguide based on vertical dip coating and reactive ion etching has been studied. To achieve the lower propagation loss, this procedure includes two original techniques, i.e., the lamination of thick polymer films and sidewall flattening. With these techniques, Δ of 5.4% and a 80 µm × 83 µm core polymer waveguide with… Show more

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Cited by 34 publications
(11 citation statements)
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“…4,5 Among the several techniques that can be applied to fabricate polymeric optical waveguide, dry etching method such as reactive ion etching (RIE) is often used because these techniques can offer excellent etching profile. [6][7][8] It has been thought that one of the disadvantages of this technique is its complicated process. Furthermore, this technique is not suitable to define large core dimensions (~ several 100 μm), which may be needed for optical applications such as interconnections.…”
Section: Introductionmentioning
confidence: 99%
“…4,5 Among the several techniques that can be applied to fabricate polymeric optical waveguide, dry etching method such as reactive ion etching (RIE) is often used because these techniques can offer excellent etching profile. [6][7][8] It has been thought that one of the disadvantages of this technique is its complicated process. Furthermore, this technique is not suitable to define large core dimensions (~ several 100 μm), which may be needed for optical applications such as interconnections.…”
Section: Introductionmentioning
confidence: 99%
“…[1,[210][211][212] Several new polymers, mostly deuterated or halogenated polyacrylates and fluorinated polyimides, have been developed with low loss in the 1000-2000 nm range and good environmental stability. [209,[213][214][215][216][217][218] Fluorinated polymers are the most transparent for telecommunication applications.…”
mentioning
confidence: 99%
“…Other optical materials such as borosilicate glass and chalcogenides have also been investigated for suitable matrix materials however polymers are often chosen due to their inherent mechanical flexability [18]. Several optical polymers have been developed; including polymethylmethacrylate (PMMA), polycarbonate and epoxy resins [19]. Materials being developed for the use in optical polymer waveguide fabrication by TPA include flexible polydimethyl diphenyl siloxane matrices [20,21].…”
Section: Introductionmentioning
confidence: 99%