Fabrication of low cost wafer-level micro-lens arrays with spacers using glass molds by combining a Chemical Foaming Process (CFP) and a Hot Forming Process (HFP)

Qin, Shucheng; Shang, Jintang; Zhang, Li; Wang, Tingting; Lv, Siyuan; Lai, Chi Ming; Kuai, Wenlin; Wei, Wenlong

doi:10.1109/ectc.2012.6248830

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Fabrication of low cost wafer-level micro-lens arrays with spacers using glass molds by combining a Chemical Foaming Process (CFP) and a Hot Forming Process (HFP)

Cited by 4 publications

References 13 publications

Preparation of a Micro Rubidium vapor cell and its integration in a chip-scale atomic magnetometer

Preparation of a Micro Rubidium vapor cell and its integration in a chip-scale atomic magnetometer

Preparation of wafer-level LED packaging used uniform micro glass cavities by an improved Chemical Foaming Process (CFP)

Study on volume production of uniform wafer-level micro glass cavities by a chemical foaming process (CFP)

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