Fabrication of Low-Loss Silicon Photonic Wires by Self-Profile Transformation and Applications in 3-D Photonic Integration and Nonlinear Optics

The micro-mechanism of the silicon-based waveguide surface smoothing is investigated systematically to explore the effects of silicon-hydrogen bonds on high-temperature hydrogen annealing waveguides. The effect of siliconhydrogen bonds on the surface migration movement of silicon atoms and the waveguide surface topography are revealed. The micro-migration from an upper state to a lower state of silicon atoms is driven by siliconhydrogen bonding, which is the key to ameliorate the rough surface morphology of the silicon-based waveguide. The process of hydrogen annealing is experimentally validated based on the simulated parameters. The surface roughness declines from 1.523 nm to 0.461 nm.

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Micro-Mechanism of Silicon-Based Waveguide Surface Smoothing in Hydrogen Annealing

Duan

Ren

Jian

et al. 2016

Chinese Phys. Lett.

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Fabrication of Crystalline Si Waveguides on (1 0 0) Bulk Si Substrate Using Laser Reformation Method

Hung

Lin

Chao

et al. 2013

J. Lightwave Technol.

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Formation of Crystalline Si Optical Waveguides on Bulk (100) Si Substrate as a New Platform for On-Chip Interconnect Applications

Hung

Lin

Chao

et al. 2017

J. Lightwave Technol.

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Fabrication of Low-Loss Silicon Photonic Wires by Self-Profile Transformation and Applications in 3-D Photonic Integration and Nonlinear Optics

Cited by 4 publications

References 30 publications

Micro-Mechanism of Silicon-Based Waveguide Surface Smoothing in Hydrogen Annealing

Micro-Mechanism of Silicon-Based Waveguide Surface Smoothing in Hydrogen Annealing

Fabrication of Crystalline Si Waveguides on (1 0 0) Bulk Si Substrate Using Laser Reformation Method

Formation of Crystalline Si Optical Waveguides on Bulk (100) Si Substrate as a New Platform for On-Chip Interconnect Applications

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