Fabrication of Low-Residual-Stress AlN Thin Films and Their Application to Microgenerators for Vibration Energy Harvesting

Zhang, Jinya; Cao, Ziping; Kuwano, Hiroki

doi:10.1143/jjap.50.09nd18

Cited by 18 publications

(6 citation statements)

References 23 publications

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“…Kuwano et al 63 used AlN thin films on Si substrates with diverse bottom electrode materials of Pt/Ti, Au/Cr, Al, and Ti to fabricate microgenerators by the micromachining process for converting environmental vibration energy into electric energy (Fig. 11).…”

Section: Energy Harvesting With Piezopolymersmentioning

confidence: 99%

A review of piezoelectric energy harvesting based on vibration

Kim

2011

Int. J. Precis. Eng. Manuf.

976

444

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This paper reviews energy harvesting technology from mechanical vibration. Recent advances on ultralow power portable electronic devices and wireless sensor network require limitless battery life for better performance. People searched for permanent portable power sources for advanced electronic devices. Energy is everywhere around us and the most important part in energy harvesting is energy transducer. Piezoelectric materials have high energy conversion ability from mechanical vibration. A great amount of researches have been conducted to develop simple and efficient energy harvesting devices from vibration by using piezoelectric materials. Representative piezoelectric materials can be categorized into piezoceramics and piezopolymers. This paper reviews key ideas and performances of the reported piezoelectric energy harvesting from vibration. Various types of vibration devices, piezoelectric materials and mathematical modeling of vibrational energy harvestings are reviewed.

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Section: Energy Harvesting With Piezopolymersmentioning

confidence: 99%

A review of piezoelectric energy harvesting based on vibration

Kim

2011

Int. J. Precis. Eng. Manuf.

976

444

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“…Fabrication and characterisation of AlN thin films grown on SUS: AlN thin films were deposited by an electron cyclotron resonance sputtering system. The details of the deposition method had been described in previous reports [7][8][9]. SUS 304 thin sheets with the thickness of about 50 mm were used as substrates.…”

Section: Materials Selection Of Piezoelectric Generatorsmentioning

confidence: 99%

Microstructure and piezoelectric properties of AlN thin films grown on stainless steel for the application of vibration energy harvesting

et al. 2012

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By analysing the energy flow in a piezoelectric generator, it was revealed that the mechanical factor, electromechanical coupling coefficient and dielectric loss of the generator have significant influence on its energy conversion efficiency. Based on this analysis, aluminium nitrate (AlN) thin films deposited on stainless steel (SUS) were selected to substitute lead titanate zirconate thin films deposited on single-crystal Si for fabricating miniature devices. These thin films were prepared with an electron cyclotron resonance sputtering system. The influences of the surface modification (polishing or coating a Pt/Ti thin layer) of SUS substrates on c-axis orientation, piezoelectric coefficient and effective coupling coefficient of AlN thin films were investigated.

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“…Furthermore, AlN is a non ferroelectric material which does not require poling or post-deposition annealing [12]. Zhang et al [13] prepared low residual stress AlN thin film on silicon substrates, and then fabricated AlN VEH. Experimental results show that the VEH can generate 1 V peak voltage and 1.42 μW average power from 1 g acceleration and 1042 Hz frequency.…”

Section: Introductionmentioning

confidence: 99%

Modeling and simulation of MEMS-based PZT beam array vibration energy harvester for high voltage output

Deng

Zhang

Zhao

2014

International Journal of Applied Electromagnetics and Mechanics

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Piezoelectric vibration energy harvester as an autonomous power source for various types of sensors, actuators and MEMS devices has been investigated over the last decade. Traditional MEMS-based PZT single beam vibration energy harvester has low voltage output (usually less than 1 V) which cause rectifier circuit to consume most of power or turn off in practical applications. In this paper, to improve the voltage output as well as ensure high power output of the MEMS-based PZT vibration energy harvester, a PZT beam array configuration is proposed. Based on Hamilton's principle and Euler-Bernoulli beam theory, mathematical model for the proposed vibration energy harvester is established, and then the model is verified through finite element model implemented by program ANSYS. Both mathematical model and ANSYS simulation show that the voltage output of the proposed vibration energy harvester is 5 times of the traditional vibration energy harvester and the mathematical model also show that the power output of the proposed vibration energy harvester is the same as the traditional vibration energy harvester. From the mathematical model, the voltage output of the proposed vibration energy harvester increase linearly with the total number of the beams.

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Fabrication of Low-Residual-Stress AlN Thin Films and Their Application to Microgenerators for Vibration Energy Harvesting

Cited by 18 publications

References 23 publications

A review of piezoelectric energy harvesting based on vibration

A review of piezoelectric energy harvesting based on vibration

Microstructure and piezoelectric properties of AlN thin films grown on stainless steel for the application of vibration energy harvesting

Modeling and simulation of MEMS-based PZT beam array vibration energy harvester for high voltage output

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