Fabrication of microcomponents using adhesive bonding techniques

Abstract

Integrating complex microcomponents, let alone microsystems, as monoliths often is not feasible. Microcomponents with parts made of different materials or by different processes can be assembled, however. In this way, closed chambers can be made which contain the movable parts. Assembly and interconnection techniques thus play a significant role in microsystems technology and have major impacts on the quality, reliability, and economic viability of microsystems. Adhesive bonding techniques have been developed and successfully applied in making complex microcomponents on a laboratory scale as well as in a small series production of micropumps. These bonding techniques will be described in this paper, and the great potential of adhesive bonding as a microassembly technique in microsystems technology will be demonstrated by three examples.

Miniaturisierter Abstandssensor, hergestellt nach dem LIGA-Verfahren

“…Im Gegensatz zum polymeren Wellenleiter werden zunächst die Linsen montiert. Diese dienen gleichzeitig als Auflage für die Deckplatte, die mittels Kapillarklebetechnik [7] verklebt wird. Um ein Vordringen des Klebstoffes bis zu den optisch aktiven Flächen des Sensors zu verhindern, wird dabei zunächst die Deckplatte auf der Sensorstruktur fixiert, leicht auf die Struktur gepreßt und am Rand zwischen Deckplatte und Sensorstruktur ein Tropfen Klebstoff per "pin transfer" aufgebracht.…”

Microgasketing and adhesive wicking techniques for fabrication of microfluidic devices

“…Adhesive bonding is generally convenient ii iniplementable for the given device [1], since it uses relatively low temperature and does not require the two mating surfaces to he completely fiat or in perfect contact. The critical issue for our situation is process compatibility due to the fact that we wish to have liquid inside the device and adhesive outside the device.…”

Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor

“…The ring was mounted onto the PMMA cylinders and glued in place using a capillary gluing technique [14]. Very small drops of glue were applied to the gap and drawn in by capillary forces.…”