Fabrication of microfluidics structures on different glasses by simplified imprinting technique

Chen, Qiuping; Chen, Qiuling; Maccioni, Gabriele

doi:10.1016/j.cap.2012.07.019

Cited by 14 publications

(11 citation statements)

References 19 publications

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“…Since the processing temperature of glass molding (>600 °C) is much higher than that of the conventional polymer molding, the nickel mold commonly used in the micro polymer molding processes cannot be utilized for glass molding due to its low mechanical resistances at high temperatrue. Nickel alloy [ 28 ], silicon carbide [ 29 ], and amorphous carbon (AC) [ 30 ] have been used as mold materials for glass molding of microfluidic structures due to their high hot hardness. To prepare the cavity structure in these refractory materials, laser aberration was applied in the previous works [ 28 , 29 , 30 ].…”

Section: Introductionmentioning

confidence: 99%

“…Nickel alloy [ 28 ], silicon carbide [ 29 ], and amorphous carbon (AC) [ 30 ] have been used as mold materials for glass molding of microfluidic structures due to their high hot hardness. To prepare the cavity structure in these refractory materials, laser aberration was applied in the previous works [ 28 , 29 , 30 ]. However, the surface quality of the mold cavity pattern fabricated by laser aberration was not suitable for precise glass microfluidic chip applications.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation

Jang

Haq

et al. 2017

Micromachines

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An all-glass bifurcation microfluidic chip for blood plasma separation was fabricated by a cost-effective glass molding process using an amorphous carbon (AC) mold, which in turn was fabricated by the carbonization of a replicated furan precursor. To compensate for the shrinkage during AC mold fabrication, an enlarged photoresist pattern master was designed, and an AC mold with a dimensional error of 2.9% was achieved; the dimensional error of the master pattern was 1.6%. In the glass molding process, a glass microchannel plate with negligible shape errors (~1.5%) compared to AC mold was replicated. Finally, an all-glass bifurcation microfluidic chip was realized by micro drilling and thermal fusion bonding processes. A separation efficiency of 74% was obtained using the fabricated all-glass bifurcation microfluidic chip.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation

Jang

Haq

et al. 2017

Micromachines

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“…Compared with polymer microfluidic devices, devices made by glass are proven to be superior in applications in the biology and chemistry fields due to its high transparency, chemical stability and good biocompatibility [ 1 ]. In order to achieve the widespread application of glass microfluidic chips, many researchers have been exploring the field of microstructure fabrication techniques on glass, and the conventional approaches can be classified into four categories: wet etching, dry etching, laser processing and mechanical processing.…”

Section: Introductionmentioning

confidence: 99%

Study the Formation Process of Cuboid Microprotrusion by Glass Molding Process †

et al. 2017

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This paper investigates the formation process of a typical microstructure in the glass microfluidic chip, i.e., cuboid microprotrusion, by the soda-lime glass molding process (GMP). The finite element models on the platform Abaqus/Standard were established for simulating the glass molding process. The glass viscoelasticity at pressing temperature was described by the General Maxwell model. The influence of the temperature, aspect ratio and side wall angle on the replication ratio was investigated, and the corresponding predicted molded profiles were demonstrated as well. The established simulation model was verified by experimental results eventually. It could provide a fundamental experience for optimizing glass molding parameters to fabricate microstructures on glass chips.

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“…Glass imprint processes have attracted interest for commercial manufacture of micro-or nanostructures for optics, electrics, and biodevices, for example, microlens arrays [1,2], surface-relief gratings [3], infrared polarizers [4], antireflective lenses [5], optical waveguides [6], and microfluidic chips [7,8]. Recently there has been ever-increasing interest in the research of microperiodic structure fabrication with high aspect ratios.…”

Section: Introductionmentioning

confidence: 99%

Room Temperature Imprint Using Crack‐Free Monolithic SiO₂‐PVA Nanocomposite for Fabricating Microhole Array on Silica Glass

Fujino

Ikeda

2015

Journal of Nanomaterials

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This paper aims to fabricate microhole arrays onto a silica glass via a room temperature imprint and subsequent sintering by using a monolithic SiO 2 -poly(vinyl alcohol) (PVA) nanocomposite as the silica glass precursor. The SiO 2 -PVA suspension was prepared from fumed silica particles and PVA, followed by drying to obtain tailored SiO 2 -PVA nanocomposites. The dependence of particle size of the fumed silica particles on pore size of the nanocomposite was examined. Nanocomposites prepared from 7 nm silica particles possessed suitable mesopores, whereas the corresponding nanocomposites prepared from 30 nm silica particles hardly possessed mesopores. The pore size of the nanocomposites increased as a function of decreasing pH of the SiO 2 -PVA suspension. As a consequence, the crack-free monolithic SiO 2 -PVA nanocomposite was obtained using 7 nm silica particles via the suspension at pH 3. Micropatterns were imprinted on the monolithic SiO 2 -PVA nanocomposite at room temperature. The imprinted nanocomposite was sintered to a transparent silica glass at 1200 ∘ C in air. The fabricated sintered glass possessed the microhole array on their surface with aspect ratios identical to the mold.

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Fabrication of microfluidics structures on different glasses by simplified imprinting technique

Cited by 14 publications

References 19 publications

Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation

Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation

Study the Formation Process of Cuboid Microprotrusion by Glass Molding Process †

Room Temperature Imprint Using Crack‐Free Monolithic SiO₂‐PVA Nanocomposite for Fabricating Microhole Array on Silica Glass

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Fabrication of microfluidics structures on different glasses by simplified imprinting technique

Cited by 14 publications

References 19 publications

Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation

Fabrication of All Glass Bifurcation Microfluidic Chip for Blood Plasma Separation

Study the Formation Process of Cuboid Microprotrusion by Glass Molding Process †

Room Temperature Imprint Using Crack‐Free Monolithic SiO2‐PVA Nanocomposite for Fabricating Microhole Array on Silica Glass

Contact Info

Product

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Room Temperature Imprint Using Crack‐Free Monolithic SiO₂‐PVA Nanocomposite for Fabricating Microhole Array on Silica Glass