Fabrication of microstructures on glass by imprinting in conventional furnace for lab-on-chip application

Chen, Qiuling; Chen, Qiuping; Maccioni, Gabriele; Sacco, Adriano; Ferrero, Sergio; Scaltrito, Luciano

doi:10.1016/j.mee.2012.01.007

Cited by 11 publications

(8 citation statements)

References 15 publications

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“…Recently, some researchers have started to shift the focus to the fabrication of microfluidic chips. Chen et al [ 39 , 40 ] used nickel alloy mold to conduct their GMP for fabricating microfluidic chips in a conventional furnace, instead of a large-volume vacuum hot press. Since there is no water cooling system, the entirety of the GMP lasted more than 15 h. Huang et al [ 41 ] utilized silicon molds to conduct the GMP in a GMP-207-HV (Toshiba Machine Co., Ltd., Shizuoka-ken, Japan) optical glass mold press machine for fabricating microfluidic chips, and the time of the GMP could, therefore, be reduced to less than 15 min.…”

Section: Introductionmentioning

confidence: 99%

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

et al. 2018

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Compared with polymer-based biochips, such as polydimethylsiloxane (PDMS), glass based chips have drawn much attention due to their high transparency, chemical stability, and good biocompatibility. This paper investigated the glass molding process (GMP) for fabricating microstructures of microfluidic chips. The glass material was D-ZK3. Firstly, a mold with protrusion microstructure was prepared and used to fabricate grooves to evaluate the GMP performance in terms of roughness and height. Next, the molds for fabricating three typical microfluidic chips, for example, diffusion mixer chip, flow focusing chip, and cell counting chip, were prepared and used to mold microfluidic chips. The analysis of mold wear was then conducted by the comparison of mold morphology, before and after the GMP, which indicated that the mold was suitable for GMP. Finally, in order to verify the performance of the molded chips by the GMP, a mixed microfluidic chip was chosen to conduct an actual liquid filling experiment. The study indicated that the fabricating microstructure of glass microfluidic chip could be finished in 12 min with good surface quality, thus, providing a promising method for achieving mass production of glass microfluidic chips in the future.

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Section: Introductionmentioning

confidence: 99%

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

et al. 2018

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“…Since conventional machining has a limitation in the machining of Ni alloy, other than for Ni–P alloy, laser machining can be applied for machining the other Ni alloy. For example, Chen et al [ 56 ] utilized laser machining on Inconel 601 (Ni-Cr-Al alloy) for fabricating a mold for glass microfluidic devices. Then, the mold layout was transferred to a soda-lime glass substrate for DNA analysis.…”

Section: Mold Materials For Precision Glass Moldingmentioning

confidence: 99%

“…Some examples of glass molding experiments that have employed Ni and Ni alloy molds are summarized in Table S2 in the Supplementary Material of S2 [ 50 , 55 , 56 , 57 , 58 , 60 , 61 , 62 , 63 , 64 , 65 , 66 , 67 , 68 ]. Ni and Ni alloy molds have high mechanical hardness, high corrosion resistance, and lower thermal expansion coefficients.…”

Section: Mold Materials For Precision Glass Moldingmentioning

confidence: 99%

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

et al. 2021

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Micro/nano-precision glass molding (MNPGM) is an efficient approach for manufacturing micro/nanostructured glass components with intricate geometry and a high-quality optical finish. In MNPGM, the mold, which directly imprints the desired pattern on the glass substrate, is a key component. To date, a wide variety of mold inserts have been utilized in MNPGM. The aim of this article is to review the latest advances in molds for MNPGM and their fabrication methods. Surface finishing is specifically addressed because molded glass is usually intended for optical applications in which the surface roughness should be lower than the wavelength of incident light to avoid scattering loss. The use of molds for a wide range of molding temperatures is also discussed in detail. Finally, a series of tables summarizing the mold fabrication methods, mold patterns and their dimensions, anti-adhesion coatings, molding conditions, molding methods, surface roughness values, glass substrates and their glass transition temperatures, and associated applications are presented. This review is intended as a roadmap for those interested in the glass molding field.

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“…The extensive use of glass in photonics has been discussed by Carvalho et al (2008) and Richardson et al (2010). Glasses are of particular importance to the micro machining industries, such as the production of lab-on-chip's as shown by Chen et al (2012), micro-electro mechanical systems (MEMS) as utilized by Tiwari and Chandra (2014), and for precision optical and electonic applications. Wiederhorn, (1971) states that unlike other brittle materials that can deform in a ductile manner when subjected to sufficient pressures, glass remains brittle even at very high pressures, is not capable of significant plastic deformation, and has been observed by Ali and Page 3 of 36 A c c e p t e d M a n u s c r i p t 3 Wang (2011) to respond to impacts by forming cracks and fracturing.…”

Section: Introductionmentioning

confidence: 99%

Abrasive waterjet micro-piercing of borosilicate glass

Schwartzentruber

Papini

2015

Journal of Materials Processing Technology

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Fabrication of microstructures on glass by imprinting in conventional furnace for lab-on-chip application

Cited by 11 publications

References 15 publications

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

Abrasive waterjet micro-piercing of borosilicate glass

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