Fabrication of microtool for micromachining: A review

Kumar, Abhinav; Kumar, Manjesh; Alok, Anupam; Yadav, Hari Narayan Singh; Das, Manas

doi:10.1016/j.matpr.2021.03.592

Cited by 6 publications

(3 citation statements)

References 18 publications

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“…These techniques are generally used for the manufacturing of, for example, micropillars and microgrooves. [ 30–33 ] Electric discharge machining (EDM) was utilized to manufacture tungsten micropillars with a minimum diameter of 7 μm and an aspect ratio of 14 as well as microgrooves with a width of 142 μm in a 500 μm‐thick tungsten plate. [ 34,35 ] Tungsten carbide was machined using EDM to manufacture micropillars with a minimum diameter of 3 μm and microholes with diameters of 60 μm in a 300 μm‐thick tungsten carbide strip.…”

Section: Introductionmentioning

confidence: 99%

High‐Resolution Patterning of Organic–Inorganic Photoresins for Tungsten and Tungsten Carbide Microstructures

et al. 2023

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Tungsten is an important material for high‐temperature applications due to its high chemical and thermal stability. Its carbide, that is, tungsten carbide, is used in tool manufacturing because of its outstanding hardness and as a catalyst scaffold due to its morphology and large surface area. However, microstructuring, especially high‐resolution 3D microstructuring of both materials, is a complex and challenging process which suffers from slow speeds and requires expensive specialized equipment. Traditional subtractive machining methods, for example, milling, are often not feasible because of the hardness and brittleness of the materials. Commonly, tungsten and tungsten carbide are manufactured by powder metallurgy. However, these methods are very limited in the complexity and resolution of the produced components. Herein, tungsten ion‐containing organic–inorganic photoresins, which are patterned by two‐photon lithography (TPL) at micrometer resolution, are introduced. The printed structures are converted to tungsten or tungsten carbide by thermal debinding and reduction of the precursor or carbothermal reduction reaction, respectively. Using TPL, complex 3D tungsten and tungsten carbide structures are prepared with a resolution down to 2 and 7 μm, respectively. This new pathway of structuring tungsten and its carbide facilitates a broad range of applications from micromachining to metamaterials and catalysis.

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Section: Introductionmentioning

confidence: 99%

High‐Resolution Patterning of Organic–Inorganic Photoresins for Tungsten and Tungsten Carbide Microstructures

et al. 2023

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“…To realize micro-or nano-scale ultra-precision machining of microstructural functional surfaces, various unconventional ultra-precision manufacturing methods which are innovative from traditional machining methods have been reported constantly [14]. Under the popularization applications of micro-electro-mechanical systems (MEMS) [15], the surface processing technique of silicon parts develops rapidly and vigorously.…”

Section: Introductionmentioning

confidence: 99%

A Review on Magnetorheological Jet Polishing Technique for Microstructured Functional Surfaces

Song

Lin

et al. 2022

Lubricants

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The magnetorheological jet polishing (MJP) technique, as a revolutionary flexible contact polishing approach, is exceptionally suitable for the smooth and ultra-smooth machining of functional surfaces with tiny or microstructures due to the following essential advantages. Machine tool accuracy is not required and there is nearly no tool wear in addition to high polishing efficiency, minimal surface damage, great surface shape adaptation, superior material removal process selectivity, and so on. This work examines the machining mechanism, the development of machining devices, and the optimization of the process parameters in MJP. This review also covers the MJP technique’s existing limitations and opportunities.

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“…1,2 Many micro-nano forming methods have been studied to improve the manufacturing of large-area micro-nano structures, including electrochemical machining (EM), chemical vapor deposition, electrical discharge machining (EDM), lithography processes, and laser beam machining. 3,4 EM provides an attractive method for manufacturing micro and nanostructures with complex shapes, internal structures, and hard-to-machine materials. 5 EM is suitable for large-scale production and has good scalability.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of sinusoidal-shaped multi-tip diamond tools by a focused ion beam machining process

Yan

Wang

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part B:

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Multi-tip diamond (MTD) tools have remarkable advantages in scratching micro-nano structures. A key component of inertial confinement fusion is a glass capsule with a periodic sinusoidal ripple nanostructure, and its processing requires very low surface roughness and a consistent nanostructure. Using MTD tools for force servo machining is an efficient method, and the focused ion beam (FIB) method has been effective in machining multi-tip diamond tools. To machine an MTD tool with high precision and efficiency, experiments were conducted to explore the influence of FIB machining parameters on tip geometries. The tip of a MTD tool with a three-dimensional periodic sinusoidal ripple was successfully prepared using optimized processing parameters. The results demonstrated that the estimated amplitude and period machining error was less than 1.71% and 1.63%, respectively, for nanoscale structured tips. Related research provides a new solution for the cross-scale and efficient processing of nanostructures.

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Fabrication of microtool for micromachining: A review

Cited by 6 publications

References 18 publications

High‐Resolution Patterning of Organic–Inorganic Photoresins for Tungsten and Tungsten Carbide Microstructures

High‐Resolution Patterning of Organic–Inorganic Photoresins for Tungsten and Tungsten Carbide Microstructures

A Review on Magnetorheological Jet Polishing Technique for Microstructured Functional Surfaces

Fabrication of sinusoidal-shaped multi-tip diamond tools by a focused ion beam machining process

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