Fabrication of multianalyte CeO 2 nanograin electrolyte–insulator–semiconductor biosensors by using CF 4 plasma treatment

Kao, Chiang; Chen, Hsiang; Hou, Fang; Chang, Shan Wei; Chang, Chih Ching; Lai, Chao−Sung; Chen, Chin Pang; He, Yuan; Lin, Shang-Ren; Hsieh, Kun Min; Lin, Min Han

doi:10.1016/j.sbsr.2015.07.001

Cited by 13 publications

(9 citation statements)

References 31 publications

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“…In this study, we successfully fabricated MgO-based EIS biosensors with a pretty high pH sensitivity of 61 mV/pH. Furthermore, CF 4 plasmas was used to shape nanostructures 22 and stabilize the material properties of the MgO membrane. Results indicate that formation of nanostructures can enlarge the contact area and hence optimize the sensing performance.…”

Section: Introductionmentioning

confidence: 99%

Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment

Kao

Chang

et al. 2017

Sci Rep

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Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF4 plasma was incorporated to improve the material quality of MgO films. Multiple material analyses including FESEM, XRD, AFM, and SIMS indicate that plasma treatment might enhance the crystallization and increase the grain size. Therefore, the sensing behaviors in terms of sensitivity, linearity, hysteresis effects, and drift rates might be improved. MgO-based EIS membranes with CF4 plasma treatment show promise for future industrial biosensing applications.

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Section: Introductionmentioning

confidence: 99%

Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment

Kao

Chang

et al. 2017

Sci Rep

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“…Table 1 provides comparative data of the sensing parameters of drift rate, pH sensitivity, hysteresis voltage, glucose, and urea sensing for different EIS devices with TbY x O y 33 , CeO 2 34 , ZnO 35 , Sm 2 O 3 36 , Ti-doped ZnO 37 , and CeO with CF 4 plasma treatment 38 . The pH sensitivity, hysteresis, drift rate, glucose and urea sensing of the EIS device prepared with In 2 TiO 5 and incorporating a CF 4 plasma sensing membrane was superior.…”

Section: Resultsmentioning

confidence: 99%

Comparison Between Performances of In2O3 and In2TiO5-Based EIS Biosensors Using Post Plasma CF4 Treatment Applied in Glucose and Urea Sensing

Lin

Kao

Lin

et al. 2019

Sci Rep

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In this study, the effect of post-deposition tetrafluoromethane (CF 4 ) plasma treatment on the physical and electrical characteristics of an In 2 TiO 5 based electrolyte-insulator-semiconductor (EIS) sensor was investigated. Post-deposition CF 4 plasma treatment typically improved the crystalline structure and repaired dangling bonds at the grain boundaries. We used the newly fabricated device to detect several ions, such as sodium and potassium, which are essential for many biological processes. The as-deposited and CF 4 plasma treated In 2 TiO 5 sensing window with an EIS structure was also able to detect the pH of a solution, different alkali ions (Na + and K + ), glucose, and urea. The sensing membrane after a 60-sec CF 4 plasma treatment displayed improved biosensing characteristics, such as higher sensitivity (59.64 mV/pH), better drift rate, and a smaller hysteresis voltage of approximately 0.424 mV/h. The In 2 TiO 5 sensing membrane treated with CF 4 plasma is a promising material for use in EIS biosensing applications.

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“…There are various MOS's used in biosensor applications. The majority part use mono-component semiconductors but there are many papers (Oh et al, 2013;Kao et al, 2015) presenting multi-component semiconductors or coupled semiconductors (composite, tandem, heterostructures, etc.). Additionally, in order to enhance certain properties these materials have been coupled with metals nanoparticles or doped with other metal ions.…”

Section: Metal Oxide Semiconductors For Enzyme-based Biosensorsmentioning

confidence: 99%

Metal Oxides-Based Semiconductors for Biosensors Applications

Ionel

Eneşca

2020

Front. Chem.

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The present mini review contains a concessive overview on the recent achievement regarding the implementation of a metal oxide semiconductor (MOS) in biosensors used in biological and environmental systems. The paper explores the pathway of enhancing the sensing characteristics of metal oxides by optimizing various parameters such as synthesis methods, morphology, composition, and structure. Four representative metal oxides (TiO 2 , ZnO, SnO 2 , and WO 3 ) are presented based on several aspects: synthesis method, morphology, functionalizing molecules, detection target, and limit of detection (LOD).

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Fabrication of multianalyte CeO 2 nanograin electrolyte–insulator–semiconductor biosensors by using CF 4 plasma treatment

Cited by 13 publications

References 31 publications

Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment

Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment

Comparison Between Performances of In2O3 and In2TiO5-Based EIS Biosensors Using Post Plasma CF4 Treatment Applied in Glucose and Urea Sensing

Metal Oxides-Based Semiconductors for Biosensors Applications

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