Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

Kim, Joon-Sung; Kim, Jang‐Joo

doi:10.1109/lpt.2004.823694

Cited by 28 publications

(9 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Gray-scale lithography 8 has a very narrow processing window, making it difficult for manufacturing. Other techniques are tilted X-ray exposure 9 and laser ablation, for which e.g. KrF Excimer lasers are used.…”

Section: Introductionmentioning

confidence: 99%

Enhanced pluggable out-of-plane coupling components for printed circuit board-level optical interconnections

et al. 2008

View full text Add to dashboard Cite

We present an enhanced out-of-plane coupling component for Printed Circuit Board-level optical interconnections. Rather than using a standard 45• micro-mirror to turn the light path over 90• , we introduce a curvature in the mirror profile and incorporate an extra cylindrical micro-lens for beam collimation. Both modifications enable an increase in coupling efficiency and are extensively investigated using non-sequential ray tracing simulations in combination with Matlab optimization algorithms. The resulting design is fabricated using Deep Proton Writing and experimental characterization of the geometrical properties and measured coupling efficiencies are presented.

show abstract

Section: Introductionmentioning

confidence: 99%

Enhanced pluggable out-of-plane coupling components for printed circuit board-level optical interconnections

et al. 2008

View full text Add to dashboard Cite

show abstract

“…The propagation loss was found to be 0.68 ± 0.05 dB/cm (6 separate measurements), which is comparable to values reported for other microfabricated polymer waveguides. 29 An image of nucleic acid probes bearing fluorescent reporters and covalently attached to the PMMA waveguide is shown in Figure 3. A typical fluorescence image of the array is shown in Figure 3A with a contour intensity plot of a single spot shown in Figure 3B.…”

Section: Fabrication Of the Waveguides And Their Operational Charactementioning

confidence: 99%

Polymer Microfluidic Chips with Integrated Waveguides for Reading Microarrays

Datta

Wang

et al. 2007

Anal. Chem.

View full text Add to dashboard Cite

A microfluidic chip with an integrated planar waveguide was fabricated in poly(methyl methacrylate), PMMA, using a single-step, double-sided hot-embossing approach. The waveguide was embedded in air on three sides and the solution being interrogated on the fourth. DNA probes were covalently attached to the waveguide surface by plasma activating the PMMA and the use of carbodiimide coupling chemistry. Successful hybridization events were read using evanescent excitation monitored by an imaging microscope, which offered high spatial resolution (2 μm) and a large field-of-view (20-mm-diameter field-of-view), providing imaging of the entire array without scanning. The application of the microfluidic/waveguide assembly was demonstrated by detecting low abundant point mutations; insertion C mutations in BRCA1 genes associated with breast cancer were analyzed using a universal array coupled to an allele-specific ligation assay. DNA probes consisting of amine-terminated oligonucleotides were printed inside the microfluidic channel using a non-contact micro-spotter. Mutant and wide-type genomic DNAs of BRCA1 were PCR amplified, with the amplicons subjected to ligation detection reactions (LDRs). LDR solutions were allowed to flow over the microarray positioned on the polymer waveguide with successful ligation events discerned through fluorescence signatures present at certain locations of the array. The microfluidic/ waveguide assembly could detect polymorphisms present at <1% of the total DNA content.

show abstract

“…Recently, optical interconnection has been extensively studied as an alternative approach to solve these problems because optical interconnection has many advantages over electrical interconnection such as high frequency, high bandwidth, light, immunity to EMI, low skew, low jitter, no need of ground line, easy for impedance matching, etc. [3], [4], [5]. Existing optical interconnection systems were realized by planar lightwave circuit (PLC), free space, and fiber array [3], [4], [5].…”

Section: Introductionmentioning

confidence: 99%

“…[3], [4], [5]. Existing optical interconnection systems were realized by planar lightwave circuit (PLC), free space, and fiber array [3], [4], [5]. Especially, polymer based PLC has several advantages because polymer is suitable for mass production with low cost, easy to control of the refractive index, and simple processing step when comparing to SiO2.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of a 45° microreflector ended polymer waveguide using one-step UV embossing technique

An¹,

Lee²,

Lee³

et al. 2006

SPIE Proceedings

View full text Add to dashboard Cite

This paper reports, for the first time, a new method of fabricating a 45°-micro-reflector-ended polymer waveguide using one-step UV embossing technique. This technique allowed us to fabricate an array twelve channel multimode polymer waveguides equipped with a 45˚-micro-reflector by using a one-step UV embossing technique. For the embossing we used a 45˚-ended silicon waveguide mold. The silicon waveguides mold has a 45˚ slope prefabricated at the end of each waveguide structure. First, a 1um-thick-SiO2 layer is grown on the (100) silicon substrate. Then, the waveguide channel is patterned. The patterned waveguide channel is tilted at 45˚ from (100) silicon alignment base line to use the wet etching morphology which has 90˚ and 45˚ etched slopes when exposed to KOH and isopropanol saturated KOH solutions. After that, silicon substrate is wet etched with KOH solution to form the rectangular waveguide patterns. Another thin SiO2 layer is deposited again to protect the waveguide patterns and substrate. A thin line is then patterned on the top of the waveguide structure and a thin-line shaped silicon surface of the top of the waveguide structure is opened. Then, the opened silicon surface is wet etched in KOH saturated with isopropanol solution. The other area is protected by SiO2 layer. The etched shape has a V-shape and the angle from the bottom side is 45˚. After SiO2 removal and cleaning, 45˚-ended silicon waveguide mold is completed. With this mold, UV embossing is performed to form undercladding structure and 45˚ slope simultaneously. And a metal film is coated on the surface of the 45˚ slope. And then, core polymer is filled and cured by UV irradiation. This method can be applicable to waveguide structures of sizes ranging from multimode to single mode.

show abstract

Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography

Cited by 28 publications

References 11 publications

Enhanced pluggable out-of-plane coupling components for printed circuit board-level optical interconnections

Enhanced pluggable out-of-plane coupling components for printed circuit board-level optical interconnections

Polymer Microfluidic Chips with Integrated Waveguides for Reading Microarrays

Fabrication of a 45° microreflector ended polymer waveguide using one-step UV embossing technique

Contact Info

Product

Resources

About