Fabrication of nano-structures on glass substrate by modified nano-imprint patterning with a plasma-induced surface-oxidized Cr mask

Transparent glass substrates are routinely used in the fabrication of metasurfaces, augmented reality (AR), virtual reality (VR), and holographic devices. While readily compatible with photolithographic patterning methods, when electron beam (E-Beam) techniques are used, field distortion and stitching errors can result due to the buildup of charge. A common approach to overcome this issue is to deposit a thin conductive polymer layer (E-Spacer). However, if high-voltage E-Beam is used to achieve nano-features, the polymer conductivity is not sufficient. We have shown that by using chromium (Cr) as an overcoating conductive layer on the resist, we can achieve accurate and seamless patterning in multiple writing fields and used the method to fabricate on-chip Si3N4 waveguides on SiO2. This technique has the potential to enable the fabrication of large-scale integrated photonic systems on transparent or dielectric substrates.

show abstract

Improvement in the optical and electrical properties of Ga-doped zinc-oxide films by using nano-imprinted pattern arrays and post-annealing

Lee

et al. 2015

Journal of the Korean Physical Society

View full text Add to dashboard Cite

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Fabrication of nano-structures on glass substrate by modified nano-imprint patterning with a plasma-induced surface-oxidized Cr mask

Cited by 3 publications

References 16 publications

Grazing-incidence small-angle X-ray scattering property of double-layered gold nanoparticle arrays

Grazing-incidence small-angle X-ray scattering property of double-layered gold nanoparticle arrays

Dielectric optical waveguide fabricated on a transparent substrate

Improvement in the optical and electrical properties of Ga-doped zinc-oxide films by using nano-imprinted pattern arrays and post-annealing

Contact Info

Product

Resources

About