Fabrication of nanochannels using underexposed nanoimprint method

Wang, Zhiwen; Chu, Jinkui; Wang, Qianyi; Zhang, Ran; Cui, Yan

doi:10.1049/mnl.2014.0412

Cited by 8 publications

(5 citation statements)

References 23 publications

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“…Nanoimprint technology is a cost-effective method for fabricating nanochannels with the advantages of high accuracy, low cost and high efficiency. Wang et al and Li et al [27,28] achieved large-scale fabrication of nanochannels through nano-imprint lithography (NIL). However, the replication precision of the combined mould with micro and nano features suffers from insufficient polymer flow caused by the non-uniform locations and size of the recessed areas on the mould [29].…”

Section: Introductionmentioning

confidence: 99%

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Zhang¹,

Huang²,

Fan³

et al. 2021

J. Micromech. Microeng.

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In order to achieve high-efficiency and high-precision fabrication of nanochannels in micro/nano-fluidic devices, a new method for integrating nano-imprint lithography manufacturing nano-channels and polydimethylsiloxane (PDMS) microchannels with silicon nitride as a bonding layer is proposed. Nanoimprint technology has the advantages of high-precision replication of the template nano-groove size and the ability to form a large number of channels at one time. By depositing silicon nitride on the surface of the nano-trench to improve its bonding force with PDMS treated with oxygen plasma, the bonding strength can withstand pressures above 0.3 MPa. The accuracy of making nanochannels with a characteristic size of 100 nm in this solution can reach more than 95%. Fluorescence experiments using this device show that the device has better enrichment capacity, and its mechanism can be explained by the size exclusion enrichment effect.

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Section: Introductionmentioning

confidence: 99%

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Zhang¹,

Huang²,

Fan³

et al. 2021

J. Micromech. Microeng.

Self Cite

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“…[24] As functional units, the nanochannels are essential components in micro/nanofluidic systems. To fabricate the nanoscale components, several fabrication techniques have been investigated, including photolithography [23,25], e-beam lithography [26,27], and nanoimprint [28,29]. These techniques can fabricate nanoscale patterns with controlled features.…”

Section: Introductionmentioning

confidence: 99%

Design of a novel 3D tip-based nanofabrication system with high precision depth control capability

Tian

Wang

et al. 2020

International Journal of Mechanical Sciences

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“…Polymethyl methacrylate (PMMA) is a major thermoplastic polymer that is widely used as a substrate material for manufacturing a micromixer [15]. At present, the main methods for preparing PMMA microfluidic chips are laser ablation [16], imprinting [17], injection molding [18], etc. Thermal bonding technology is the most commonly used method for simple and fast micromixer packaging [19].…”

Section: Introductionmentioning

confidence: 99%

CO2 laser ablation of microchannel on PMMA substrate for Koch fractal micromixer

Zhang

Chen

2019

J Braz. Soc. Mech. Sci. Eng.

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In this paper, we mainly study the processing and manufacturing methods of the Koch fractal micromixer on polymethyl methacrylate (PMMA) substrate using a flexible and low-cost CO 2 laser system. The structure of Koch fractal microchannel can increase the contact area of the fluids, prolong the mixing time and improve the mixing efficiency of the micromixer. The study focuses on the effect of the CO 2 laser system processing power, scanning speed and the number of scanning times on the quality of microchannel. With the increase in processing power and the number of scanning times, the width and depth of the microchannel change more obviously; this contributes to the hot-bonding success of the Koch fractal micromixer, avoiding the hot-bonding failure causes by the overvoltage or overheat. At last, the CO 2 laser output power of 7 W and a laser scanning speed of 10 mm/s combining a hot press bonding technique are chosen to fabricate a microfluidic chip within half an hour. The fabrication of microchannel on PMMA substrates with CO 2 laser system will have a wide range of application values, resulting in lower costs and easier fabrication.

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Fabrication of nanochannels using underexposed nanoimprint method

Cited by 8 publications

References 23 publications

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Design of a novel 3D tip-based nanofabrication system with high precision depth control capability

CO2 laser ablation of microchannel on PMMA substrate for Koch fractal micromixer

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