Fabrication of nanostructured superconducting single-photon detectors

Gol’tsman, G.; Smirnov, K.; Kouminov, P.; Voronov, B.; Kaurova, N.; Drakinsky, V.; Zhang, J.; Verevkin, A.; Sobolewski, Roman

doi:10.1109/tasc.2003.813678

Cited by 85 publications

(51 citation statements)

References 11 publications

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“…Contacts of 20 nm Nb and 60 nm Au were made using electron beam lithography and lift-off. Subsequently, we defined an etch mask of hydrogen silsesquioxane ͑HSQ͒ with electron beam lithography, and the material not covered with HSQ after exposure and development was etched away by reactive ion etching in a plasma of SF 6 and O 2 , followed by the removal of the etch mask with HF. Finally, the samples were glued and bonded on a chip carrier for testing.…”

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confidence: 99%

Low noise superconducting single photon detectors on silicon

Dorenbos

Reiger

Perinetti

et al. 2008

Applied Physics Letters

134

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We have fabricated superconducting nanowire single photon detectors made of NbTiN on a silicon substrate. This type of material reduces the dark count rate by a factor of 10 compared to identical NbN detectors, enabling single photon detection with unprecedented signal to noise ratio: we report a noise equivalent power of 10−19 W Hz−1/2 at 4.2 K. The compatibility of our superconducting device with silicon enables its integration with complex structures.

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confidence: 99%

Low noise superconducting single photon detectors on silicon

Dorenbos

Reiger

Perinetti

et al. 2008

Applied Physics Letters

134

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“…The chips were fabricated in Moscow using the technology described in Ref. 5. The SSPD meander was aligned to the fiber core with a precision of less than a 1 m and held in place by a beryllium copper spring.…”

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confidence: 99%

Single-photon experiments at telecommunication wavelengths using nanowire superconducting detectors

Zinoni

Alloing

et al. 2007

Applied Physics Letters

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Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication Citation for published version (APA):Zinoni, C., Alloing, B., Li, L., Marsili, F., Fiore, A., Lunghi, L., ... Gol'tsman, G. N. (2007). Single-photon experiments at telecommunication wavelengths using nanowire superconducting detectors. Applied Physics Letters, 91(3), 031106-1/3. [031106]. DOI: 10.1063/1.2752108 General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. The authors report fiber-coupled superconducting single-photon detectors with specifications that exceed those of avalanche photodiodes, operating at telecommunication wavelength, in sensitivity, temporal resolution, and repetition frequency. The improved performance is demonstrated by measuring the intensity correlation function g ͑2͒ ͑͒ of single-photon states at 1300 nm produced by single semiconductor quantum dots.

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“…NbN films 3-4 nm thick were grown on sapphire (substrate temperature T S =900°C (Gol'tsman et al 2003;Gol'tsman et al 2007)) or MgO (T S =400°C (Marsili et al 2008)) www.intechopen.com substrates by reactive magnetron sputtering in an argon-nitrogen gas mixture. Using an optimized sputtering technique, our NbN samples exhibited a superconducting transition temperature of T C =10.5 K for 40-Å-thick films.…”

Section: Fabricationmentioning

confidence: 99%