Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray Lithography

Kim, Kanghyun; Park, Kyungjin; Nam, Hyoryung; Kim, Geon Hwee; Hong, Seong Kyung; Kim, Suhyeon; Woo, Hyeonsu; Yoon, Seungbin; Kim, Jong Hyun; Lim, Geunbae

doi:10.3390/polym13071045

Cited by 3 publications

(3 citation statements)

References 24 publications

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“…In masked type lithography approaches, the nano/micro patterns are transferred on the surface using a template or mask. Photolithography [ 43 ], contact lithography [ 44 ], X-ray lithography [ 45 ], nanoimprint lithography [ 46 ], soft lithography [ 47 ] etc. are some popular examples of masked lithography.…”

Section: Fabrication Techniquesmentioning

confidence: 99%

A Review on Low-Dimensional Nanomaterials: Nanofabrication, Characterization and Applications

et al. 2022

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The development of modern cutting-edge technology relies heavily on the huge success and advancement of nanotechnology, in which nanomaterials and nanostructures provide the indispensable material cornerstone. Owing to their nanoscale dimensions with possible quantum limit, nanomaterials and nanostructures possess a high surface-to-volume ratio, rich surface/interface effects, and distinct physical and chemical properties compared with their bulk counterparts, leading to the remarkably expanded horizons of their applications. Depending on their degree of spatial quantization, low-dimensional nanomaterials are generally categorized into nanoparticles (0D); nanorods, nanowires, and nanobelts (1D); and atomically thin layered materials (2D). This review article provides a comprehensive guide to low-dimensional nanomaterials and nanostructures. It begins with the classification of nanomaterials, followed by an inclusive account of nanofabrication and characterization. Both top-down and bottom-up fabrication approaches are discussed in detail. Next, various significant applications of low-dimensional nanomaterials are discussed, such as photonics, sensors, catalysis, energy storage, diverse coatings, and various bioapplications. This article would serve as a quick and facile guide for scientists and engineers working in the field of nanotechnology and nanomaterials.

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Section: Fabrication Techniquesmentioning

confidence: 99%

A Review on Low-Dimensional Nanomaterials: Nanofabrication, Characterization and Applications

et al. 2022

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“…The final structure is shown in Figure 1c1. Kim et al (Kim et al, 2021) controlled the oblique angle of submicron-scale structures over centimeter-scale areas using an inclined X-ray exposure through a mask with slanted structures. They produced high-aspect-ratio patterns angled at 20 °and 10 °, respectively, shown in Figure 1c2.…”

Section: Pencil-beam Mode Exposurementioning

confidence: 99%

X-Ray Lithography for Nanofabrication: Is There a Future?

Bharti

Turchet

Marmiroli

2022

Front. Nanotechnol.

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X-ray lithography has been first proposed almost 50 years ago, and the related LIGA process around 25 years ago. It is therefore a good time to make an analysis of the technique, with its pros and cons. In this perspective article, we describe X-ray lithography’s latest advancements. First, we report the improvement in the fabrication of the high aspect ratio and high-resolution micro/nanostructures. Then, we present the radiation-assisted synthesis and processing of novel materials for the next generation of functional devices. We finally draw our conclusion on the future prospects of the technique.

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“…As a result, they showed good mechanical strength, high transparency, and 3D printability. Examples were also demonstrated by applying various polymer microfabrication techniques such as ion-milling on epoxy resin [ 10 ], the fabrication of oblique structures via hard X-ray lithography [ 11 ], paper-based microfluidics constructed via spraying [ 12 ], micromechanical punch for the fabrication of non-spherical microparticles [ 13 ], electrostatic self-assembly of composite nanofiber yarn [ 14 ], and mechanical and chemical polishing of the surface of polymer microchannels [ 15 ]. The editors are confident that the readers will benefit from this book by gaining common knowledge regarding polymer microfabrication techniques and a better understanding of the practical uses and versatility of these techniques through the demonstrated examples.…”

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confidence: 99%