Fabrication of on-chip probes for double-tip scanning tunneling microscopy

Leeuwenhoek, Maarten; Groenewoud, Freek; Oosten, Kees van; Benschop, Tjerk; Allan, Milan P.; Gröblacher, Simon

doi:10.1038/s41378-020-00209-y

Cited by 6 publications

(5 citation statements)

References 40 publications

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“…Consequently, several attempts have been made to investigate the use of 2D materials in various wearable sensors for detecting diverse biological signals originating at different parts of the human body (Table ). ,− The human physiological information can be categorized into two classes of physical and chemical signals. The physical signals mainly include body temperature, electrograms, subtle signals, and limb motions.…”

Section: Applications For Flexible Electronicsmentioning

confidence: 99%

2D Materials in Flexible Electronics: Recent Advances and Future Prospectives

Katiyar,

Hoang,

et al. 2023

Chem. Rev.

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Flexible electronics have recently gained considerable attention due to their potential to provide new and innovative solutions to a wide range of challenges in various electronic fields. These electronics require specific material properties and performance because they need to be integrated into a variety of surfaces or folded and rolled for newly formatted electronics. Two-dimensional (2D) materials have emerged as promising candidates for flexible electronics due to their unique mechanical, electrical, and optical properties, as well as their compatibility with other materials, enabling the creation of various flexible electronic devices. This article provides a comprehensive review of the progress made in developing flexible electronic devices using 2D materials. In addition, it highlights the key aspects of materials, scalable material production, and device fabrication processes for flexible applications, along with important examples of demonstrations that achieved breakthroughs in various flexible and wearable electronic applications. Finally, we discuss the opportunities, current challenges, potential solutions, and future investigative directions about this field.

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Section: Applications For Flexible Electronicsmentioning

confidence: 99%

2D Materials in Flexible Electronics: Recent Advances and Future Prospectives

Katiyar,

Hoang,

et al. 2023

Chem. Rev.

View full text Add to dashboard Cite

show abstract

“…In a second step, variable shape electron beam lithography followed by an RIE step defines the main elements of the probe in the whole device layer thickness, including the ring, its anchors and its tip, the waveguide, the capacitive transducers, and their associated electrical interconnects. Back-side deep RIE, or alternatively a combination of saw dicing and RIE 41 , is realized through the whole thickness of the underlying silicon substrate, intending to make the probe chips detachable from the wafer and to make the tip overhang the chip edge. The ring of the probe is finally released by etching the 1 μm-thick sacrificial oxide layer using vapor HF, and the underetching is controlled so that the ring becomes free to vibrate but remains anchored to the substrate through the spokes and the wider central post.…”

Section: Implementation and Fabricationmentioning

confidence: 99%

Very-high-frequency probes for atomic force microscopy with silicon optomechanics

et al. 2022

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Atomic force microscopy (AFM) has been consistently supporting nanosciences and nanotechnologies for over 30 years and is used in many fields from condensed matter physics to biology. It enables the measurement of very weak forces at the nanoscale, thus elucidating the interactions at play in fundamental processes. Here, we leverage the combined benefits of micro/nanoelectromechanical systems and cavity optomechanics to fabricate a sensor for dynamic mode AFM at a frequency above 100 MHz. This frequency is two decades above the fastest commercial AFM probes, suggesting an opportunity for measuring forces at timescales unexplored thus far. The fabrication is achieved using very-large-scale integration technologies derived from photonic silicon circuits. The probe’s optomechanical ring cavity is coupled to a 1.55 μm laser light and features a 130 MHz mechanical resonance mode with a quality factor of 900 in air. A limit of detection in the displacement of 3 × 10−16 m/√Hz is obtained, enabling the detection of the Brownian motion of the probe and paving the way for force sensing experiments in the dynamic mode with a working vibration amplitude in the picometer range. When inserted in a custom AFM instrument embodiment, this optomechanical sensor demonstrates the capacity to perform force-distance measurements and to maintain a constant interaction strength between the tip and sample, an essential requirement for AFM applications. Experiments indeed show a stable closed-loop operation with a setpoint of 4 nN/nm for an unprecedented subpicometer vibration amplitude, where the tip–sample interaction is mediated by a stretched water meniscus.

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“…[25][26][27][28] This has ushered a new standard for electrochemical MIP-based biosensors toward a translational capacity for targets with various sizes and geometries in complex biofluids for selective biosensing. [29][30][31] In case of the NFluidEX, a thin layer of MIP monomer was electropolymerized in the presence of a target template on the NMIs sensor, in which the template was then removed to leave built-in recognition sites to rebind to the target and generate a strong electrical signal. [32,33] The MIP biomimetic receptors are tunable with the morphological and physical characteristics of the target and can be rapidly adapted for various viral subtypes and variants of concern.…”

Section: Introductionmentioning

confidence: 99%

A Versatile Biomimic Nanotemplating Fluidic Assay for Multiplex Quantitative Monitoring of Viral Respiratory Infections and Immune Responses in Saliva and Blood

et al. 2022

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The last pandemic exposed critical gaps in monitoring and mitigating the spread of viral respiratory infections at the point‐of‐need. A cost‐effective multiplexed fluidic device (NFluidEX), as a home‐test kit analogous to a glucometer, that uses saliva and blood for parallel quantitative detection of viral infection and body's immune response in an automated manner within 11 min is proposed. The technology integrates a versatile biomimetic receptor based on molecularly imprinted polymers in a core–shell structure with nano gold electrodes, a multiplexed fluidic‐impedimetric readout, built‐in saliva collection/preparation, and smartphone‐enabled data acquisition and interpretation. NFluidEX is validated with Influenza A H1N1 and SARS‐CoV‐2 (original strain and variants of concern), and achieves low detection limit in saliva and blood for the viral proteins and the anti‐receptor binding domain (RBD) Immunoglobulin G (IgG) and Immunoglobulin M (IgM), respectively. It is demonstrated that nanoprotrusions of gold electrodes are essential for the fine templating of antibodies and spike proteins during molecular imprinting, and differentiation of IgG and IgM in whole blood. In the clinical setting, NFluidEX achieves 100% sensitivity and 100% specificity by testing 44 COVID‐positive and 25 COVID‐negative saliva and blood samples on par with the real‐time quantitative polymerase chain reaction (p < 0.001, 95% confidence) and the enzyme‐linked immunosorbent assay.

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Fabrication of on-chip probes for double-tip scanning tunneling microscopy

Cited by 6 publications

References 40 publications

2D Materials in Flexible Electronics: Recent Advances and Future Prospectives

2D Materials in Flexible Electronics: Recent Advances and Future Prospectives

Very-high-frequency probes for atomic force microscopy with silicon optomechanics

A Versatile Biomimic Nanotemplating Fluidic Assay for Multiplex Quantitative Monitoring of Viral Respiratory Infections and Immune Responses in Saliva and Blood

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