2022
DOI: 10.1038/s41378-022-00364-4
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Very-high-frequency probes for atomic force microscopy with silicon optomechanics

Abstract: Atomic force microscopy (AFM) has been consistently supporting nanosciences and nanotechnologies for over 30 years and is used in many fields from condensed matter physics to biology. It enables the measurement of very weak forces at the nanoscale, thus elucidating the interactions at play in fundamental processes. Here, we leverage the combined benefits of micro/nanoelectromechanical systems and cavity optomechanics to fabricate a sensor for dynamic mode AFM at a frequency above 100 MHz. This frequency is two… Show more

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Cited by 15 publications
(5 citation statements)
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“…Recently, cavity optomechanical sensors have been studied for use as ultrasensitive chemical and biological sensors [9]- [14] and high-frequency rheometers [15] in liquid environments. To perform highly sensitive detection of mechanical motion in a liquid environment, it is of utmost Motoki Asano, Hiroshi Yamaguchi, and Hajime Okamoto are with the NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, cavity optomechanical sensors have been studied for use as ultrasensitive chemical and biological sensors [9]- [14] and high-frequency rheometers [15] in liquid environments. To perform highly sensitive detection of mechanical motion in a liquid environment, it is of utmost Motoki Asano, Hiroshi Yamaguchi, and Hajime Okamoto are with the NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan.…”
Section: Introductionmentioning
confidence: 99%
“…The integrated resonator used for motion detection also provides a potentially quantum-limited approach to motion detection. It is difficult to make a complete and detailed comparison of AFM force sensors using a microwave resonator with those using an optical cavity to detect motion [ 10 , 43 ] because of numerous differences in the entire measurement apparatus. However, in comparison to optical resonators, the ability of microwave resonators to easily operate in the sideband-resolved regime allows for additional and potentially more efficient schemes of sensing force with minimal back-action from motion detection.…”
Section: Discussionmentioning
confidence: 99%
“…In addition, high-frequency cantilevers can contribute to shorter measuring times due to their smaller dimensions [57] and the use of multi-cantilever arrays [58], which can contribute to shorter measuring/fabrication times.…”
Section: Discussionmentioning
confidence: 99%