Fabrication of PbTiO₃Nanocrystals on Atomically Flat Sapphire Substrates by RF Magnetron Sputtering

Fabrication of atomically flat Pt layer on sapphire substrate by low angle incidence sputtering method

“…However, position and size of PbTiO 3 nanocrystals can be successfully controlled by atomically flat sapphire substrate and the low angle sputter in our report. [4] The growth position has been step edge in step-terrace structure formed on the substrate, and two-dimensional PbTiO 3 nanocrysrtal array can be obtained. [5] However, evaluation of electrical properties has been difficult because the nanocrystals are grown on electric insulation substrate such as sapphire.…”