Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique

Zhong, Kangping; Gao, Yiqing; Li, Feng; Zhang, Zhimin; Luo, Ningning

doi:10.1016/j.ijleo.2013.10.082

Cited by 43 publications

(17 citation statements)

References 13 publications

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“…The previous approaches, however, involve point-bypoint writing of nanovoxels or nanopixels, which are very time-consuming and expensive for wafer-scale processing. To avoid long processing time, two variants of 2.5D methods have been proposed: gray-tone masks and digital micromirror device (DMD ® ) (Totsu et al 2006;Rammohan et al 2011;Zhong et al 2014). In the former, 2.5D fabrication is achieved by using a physical mask whose transparency is not uniform.…”

Section: Different Approaches To Fabricate Nanoslits With Complex Depmentioning

confidence: 99%

Quasi-static drainage in a network of nanoslits of non-uniform depth designed by grayscale laser lithography

Naillon

Massadi

Courson

et al. 2017

Microfluid Nanofluid

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Section: Different Approaches To Fabricate Nanoslits With Complex Depmentioning

confidence: 99%

Quasi-static drainage in a network of nanoslits of non-uniform depth designed by grayscale laser lithography

Naillon

Massadi

Courson

et al. 2017

Microfluid Nanofluid

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“…After that, the PDMS mixture was casted on the substrate surface as shown in figure 8. The susbtrate with PDMS mixture was baked in the oven at a temperature of 120 o C for 1 hour [11]. After baked, the PDMS mould was allowed to cool down until ambient temperature.…”

Section: Pdms Mould Replication Processmentioning

confidence: 99%

The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL

Beh

Samsuri

Lee

et al. 2016

IOP Conf. Ser.: Mater. Sci. Eng.

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Abstract. In recent years, low-cost micro and nano fabrication process have gain intention from the manufacturing industry. Biochip is a platform of miniaturized microarrays arranged on a solid substrate that allows various biological tests to achieve immediate results. The development of biochip has established a new platform in biomedical industry. However, to fulfill the demands and availability in the market with affordable cost requires high volume manufacturing techniques for the fabrication of the biochips. In this article we will discuss the fabrication of PDMS mould for replicating microelectrode array of biochip. The fabrication of the microelectrodes utilizes the Nanoimprint lithography (NIL) technique. Finally, the fabrication of PDMS mould has been demonstrated successfully for using Nanoimprint lithography (NIL) technique and achieved 13 % of size difference in overall.

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“…Recent reports have demonstrated various fabrication processes for MLAs including ink-jetting [5], excimer laser ablation [6,7], excimer laser micromachining [8], grayscale lithography [9], and photoresist thermal reflow [10]. However, most of them still face common problems such as numerous, complex fabrication steps, which results in high cost and time-consuming.…”

Section: Introductionmentioning

confidence: 99%

Microfabrication of Microlens by Timed-Development-and-Thermal-Reflow (TDTR) Process for Projection Lithography

2020

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This paper presents a microlens fabrication process using the timed-development-and-thermal-reflow process, which can fabricate various types of aperture geometry with a parabolic profile on a single substrate in the same batch of the process. By controlling the development time of the uncrosslinked negative photoresist, a state of partial development of the photoresist is achieved, called the timed development process. The thermal reflow process is followed after the timed development, which allows the photoresist to regain its liquid state to form a smooth meniscus trench surrounded by a crosslinked photoresist sidewall. Microlens with larger aperture size forms deeper trench with constant development time. With constant aperture size, longer developing time shows deeper meniscus trench. The depth of the meniscus trench is modeled in the relationship of the development time and aperture size. Other characteristics for the microlens including the radius of curvature, focal length, and the parabolic surface profile are modeled in the relationship of the microlens thickness and diameter. Microlens with circular, square, and hexagonal bases have been successfully fabricated and demonstrated where each geometry of the lens-bases shows different fill factors of the lens arrays. To test the fabricated lenses, a miniaturized projection lithography scheme was proposed. A centimeter-scale photomask pattern was photo-reduced using the fabricated microlens array with a ratio of 133, where the smallest linewidth was measured as 2.6 µm.

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Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique

Cited by 43 publications

References 13 publications

Quasi-static drainage in a network of nanoslits of non-uniform depth designed by grayscale laser lithography

Quasi-static drainage in a network of nanoslits of non-uniform depth designed by grayscale laser lithography

The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL

Microfabrication of Microlens by Timed-Development-and-Thermal-Reflow (TDTR) Process for Projection Lithography

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