Fabrication of planar and curved polyimide membranes with a pattern transfer method using ZnO nanowire arrays as templates

An, Boo Hyun; Cho, Hyun Ah; Kim, Young Keun

doi:10.1016/j.matlet.2015.02.114

Cited by 7 publications

(4 citation statements)

References 22 publications

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“…Research on ZnO nanostructures has increased with increased accessibility of such materials of high quality that offer unique properties . The different structures of ZnO nanomaterials have been researched recently by the membrane industry and include shapes such as nanovessels, nanowires, nanoparticles and spheres. Although ZnO has been investigated for MMMs as a filler, there is no thorough study on the influence of ZnO on MMM gas separation properties.…”

Section: Introductionmentioning

confidence: 99%

Comparison of ZnO nanofillers of different shapes on physical, thermal and gas transport properties of PEBA membrane: experimental testing and molecular simulation

Asghari

Sheikh

Dehghani

2018

J of Chemical Tech & Biotech

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BACKGROUND PEBA and nano‐ZnO have been discussed for membrane modification and for gas separation in different studies and in mixed matrix membranes (i.e. PEBA/TiO2, PE/ZnO); however, no report has been published on the gas transport properties of ZnO/PEBA hybrid membranes. RESULTS Molecular simulation and experimental approaches were done using PEBA 1657 mixed matrix membranes (MMMs) loaded with ZnO nanorod‐ and nanosphere shaped nanomaterials at 0.5 wt% and 1 wt% loading to investigate the gas separation properties of these MMMs. Structural characterizationwas carried out by FESEM, AFM, BET and FTIR on synthesized membranes, and FFV and WAXD on the simulated membrane cells to study their structural properties. Thermal analysis was carried out by TGA, DMTA and calculation of the glass transition temperature to investigate the thermal properties of the MMMs. The results showed that the addition of ZnO filler significantly improved both the physical and thermal properties of the MMMs based on the characterization tests. The transport properties of the MMMs for three single light gas molecules (CO2, CH4 and N2) were investigated using experimental set‐up testing (permeability and selectivity), and also by molecular dynamic and Monte Carlo approaches in molecular simulation (diffusivity and solubility). The addition of ZnO nanomaterials in both shapes to the polymeric membrane significantly increased the transport properties; for example, CO2 permeability increased from 120 for membrane without nanomaterial to 135 barrer for membrane with 0.5 wt% of nanosphere ZnO and 157 barrer for membrane with 0.5 wt% nanorod ZnO. CONCLUSION The permeability of CH4 and N2 gases into all samples showed no significant change with an increase in pressure or ZnO loading which is likely due to the penetration paths in the membranes. The membrane with 1 wt% ZnO nanorods had the best performance in the Robeson upper bound 2008 diagram. This sample is thus suggested for industrial development. The simulation results showed a similar trend for the membranes and gas molecules, with an error of 25% to 65% from experimental results. We conclude that the PEBA/1 wt% ZnO nanorods membrane could be an ideal solid polymer membrane for gas separation applications. © 2018 Society of Chemical Industry

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Section: Introductionmentioning

confidence: 99%

Comparison of ZnO nanofillers of different shapes on physical, thermal and gas transport properties of PEBA membrane: experimental testing and molecular simulation

Asghari

Sheikh

Dehghani

2018

J of Chemical Tech & Biotech

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“…j Etching the top layer of the polyimide film. k Resulting nanoporous polyimide membrane after etching the nanowires and substrate 141 …”

Section: Micropatterning Of Polyimidementioning

confidence: 99%

“…Another approach is to process an easily removable mold as a sacrificial layer, to coat and cure PI on it, and to then remove the sacrificial layer to obtain a patterned polyimide. An et al reported the fabrication of nanoporous polyimide membranes with a pattern transfer method using ZnO nanowire arrays as templates 141 . The fabrication process is shown in Fig.…”

Section: Micropatterning Of Polyimidementioning

confidence: 99%

“…j Etching the top layer of the polyimide film. k Resulting nanoporous polyimide membrane after etching the nanowires and substrate 141 micro accelerometer (Fig. 9b), Wu et al a novel optimization method involving the insertion of photosensitive polyimide to reduce parasitic capacitance and thus to overcome the fringe effect 146 .…”

Section: Polyimide As a Structural Materialsmentioning

confidence: 99%

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Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Dong

Shen

et al. 2023

Microsyst Nanoeng

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Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication. The aims of this review are to systematically discuss polyimide microfabrication techniques, which cover film formation, material conversion, micropatterning, 3D microfabrication, and their applications. With an emphasis on polyimide-based flexible MEMS devices, we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field.

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Shape-Controlled Synthesis of Melamine Based Polyamide Materials and Application in Suzuki-Miyaura Coupling Reaction

Chen

Zhang

et al. 2019

Macromol. Res.

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Fabrication of planar and curved polyimide membranes with a pattern transfer method using ZnO nanowire arrays as templates

Cited by 7 publications

References 22 publications

Comparison of ZnO nanofillers of different shapes on physical, thermal and gas transport properties of PEBA membrane: experimental testing and molecular simulation

Comparison of ZnO nanofillers of different shapes on physical, thermal and gas transport properties of PEBA membrane: experimental testing and molecular simulation

Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Shape-Controlled Synthesis of Melamine Based Polyamide Materials and Application in Suzuki-Miyaura Coupling Reaction

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