Fabrication of Si 3 N 4 -Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process

Yamanaka

2020

Micromachines

A novel feedback control technique for the local oscillation amplitude in an artificial cochlear sensory epithelium that mimics the functions of the outer hair cells in the cochlea is successfully developed and can be implemented with a control time on the order of hundreds of milliseconds. The prototype artificial cochlear sensory epithelium was improved from that developed in our previous study to enable the instantaneous determination of the local resonance position based on the electrical output from a bimorph piezoelectric membrane. The device contains local patterned electrodes deposited with micro electro mechanical system (MEMS) technology that is used to detect the electrical output and oscillate the device by applying local electrical stimuli. The main feature of the present feedback control system is the principle that the resonance position is recognized by simultaneously measuring the local electrical outputs of all of the electrodes and comparing their magnitudes, which drastically reduces the feedback control time. In this way, it takes 0.8 s to control the local oscillation of the device, representing the speed of control with the order of one hundred times relative to that in the previous study using the mechanical automatic stage to scan the oscillation amplitude at each electrode. Furthermore, the intrinsic difficulties in the experiment such as the electrical measurement against the electromagnetic noise, adhesion of materials, and fatigue failure mechanism of the oscillation system are also shown and discussed in detail based on the many scientific aspects. The basic knowledge of the MEMS fabrication and the experimental measurement would provide useful suggestions for future research. The proposed preliminary prototype high-speed feedback control can aid in the future development of fully implantable cochlear implants with a wider dynamic range.

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Preliminary Prototype High-Speed Feedback Control of an Artificial Cochlear Sensory Epithelium Mimicking Function of Outer Hair Cells

Yamanaka

2020

Micromachines

“…The concept of developing such implants is based on biomimetics, with the key functions being the frequency selectivity of the basilar membrane and the conversion of sound/electrical signals of the inner hair cells. Commonly used methods for reproducing the frequency selectivity include the fabrication of trapezoidal membranes [ 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 ] and beams of different lengths [ 19 , 20 , 21 , 22 , 23 , 24 ]. Organic piezoelectric materials made of polyvinylidene difluoride (PVDF) [ 10 , 11 , 13 , 17 , 18 , 24 ] or poly(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) [ 25 ] and inorganic materials comprising lead zirconate titanate [ 12 , 23 ], zinc oxide [ 14 ], and aluminum nitride [ 19 , 20 , 21 ] have been used for sound/electrical signal conversion.…”

Section: Introductionmentioning

confidence: 99%

Oscillation Characteristics of an Artificial Cochlear Sensory Epithelium Optimized for a Micrometer-Scale Curved Structure

Kohno

2022

Micromachines

Based on the modern microelectromechanical systems technology, we present a revolutionary miniaturized artificial cochlear sensory epithelium for future implantation tests on guinea pigs. The device was curved to fit the spiral structure of the cochlea and miniaturized to a maximum dimension of <1 mm to be implanted in the cochlea. First, the effect of the curved configuration on the oscillation characteristics of a trapezoidal membrane was evaluated using the relatively larger devices, which had a trapezoidal and a comparable curved shape designed for high-precision in vitro measurements. Both experimental and numerical analyses were used to determine the resonance frequencies and positions, and multiple oscillation modes were clearly observed. Because the maximum oscillation amplitude positions, i.e., the resonance positions, differed depending on the resonance frequencies in both trapezoidal and curved membrane devices, the sound frequency was determined based on the resonance position, thus reproducing the frequency selectivity of the basilar membrane in the organ of Corti. Furthermore, the resonance frequencies and positions of these two devices with different configurations were determined to be quantitatively consistent and similar in terms of mechanical dynamics. This result shows that despite a curved angle of 50–60°, the effect of the curved shape on oscillation characteristics was negligible. Second, the nanometer-scale oscillation of the miniaturized device was successfully measured, and the local resonance frequency in air was varied from 157 to 277 kHz using an experimental system that could measure the amplitude distribution in a two-dimensional (2D) plane with a high accuracy and reproducibility at a high speed. The miniaturized device developed in this study was shown to have frequency selectivity, and when the device was implanted in the cochlea, it was expected to discriminate frequencies in the same manner as the basilar membrane in the biological system. This study established methods for fabricating and evaluating the miniaturized device, and the proposed miniaturized device in a curved shape demonstrated the feasibility of next-generation cochlear implants.

“…For future clinical applications, micro‐machined cochlea must show frequency selectivity and be able to convert mechanical oscillations into electrical signals. Frequency selectivity has been achieved by using trapezoidal membranes 3,4,8‐12 and arrays of beams with different lengths 15‐20 to allow a variable local resonance frequency. Piezoelectric materials convert mechanical deformations into electric potentials via the piezoelectric effect and have been commonly used in micro‐machined cochleae 3,4,8‐12,15‐20 .…”

Section: Introductionmentioning

confidence: 99%

“…Frequency selectivity has been achieved by using trapezoidal membranes 3,4,8‐12 and arrays of beams with different lengths 15‐20 to allow a variable local resonance frequency. Piezoelectric materials convert mechanical deformations into electric potentials via the piezoelectric effect and have been commonly used in micro‐machined cochleae 3,4,8‐12,15‐20 . Although Shintaku et al 19 have shown that poly(vinylidene fluoride–trifluoroethylene) (P[VDF‐TrFE]) films are biocompatible and have low toxicity for humans, organic piezoelectric materials generally have a lower efficiency.…”

Section: Introductionmentioning

confidence: 99%

Mathematical model of the auditory nerve response to stimulation by a micro‐machined cochlea

Numer Methods Biomed Eng

Tsuji

Doi

2021

We report a novel mathematical model of an artificial auditory system consisting of a micro‐machined cochlea and the auditory nerve response it evokes. The modeled micro‐machined cochlea is one previously realized experimentally by mimicking functions of the cochlea [Shintaku et al, Sens. Actuat. 158 (2010) 183–192; Inaoka et al, Proc. Natl. Acad. Sci. USA 108 (2011) 18390–18395]. First, from the viewpoint of mechanical engineering, the frequency characteristics of a model device were experimentally investigated to develop an artificial basilar membrane based on a spring–mass–damper system. In addition, a nonlinear feedback controller mimicking the function of the outer hair cells was incorporated in this experimental system. That is, the developed device reproduces the proportional relationship between the oscillation amplitude of the basilar membrane and the cube root of the sound pressure observed in the mammalian auditory system, which is what enables it to have a wide dynamic range, and the characteristics of the control performance were evaluated numerically and experimentally. Furthermore, the stimulation of the auditory nerve by the micro‐machined cochlea was investigated using the present mathematical model, and the simulation results were compared with our previous experimental results from animal testing [Shintaku et al, J. Biomech. Sci. Eng. 8 (2013) 198–208]. The simulation results were found to be in reasonably good agreement with those from the previous animal test; namely, there exists a threshold at which the excitation of the nerve starts and a saturation value for the firing rate under a large input. The proposed numerical model was able to qualitatively reproduce the results of the animal test with the micro‐machined cochlea and is thus expected to guide the evaluation of micro‐machined cochleae for future animal experiments.