2014
DOI: 10.1063/1.4869238
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Fabrication of silicon nanotip arrays with high aspect ratio by cesium chloride self-assembly and dry etching

Abstract: Nanotip arrays with high aspect ratio, which have attracted much attention due to their potential applications, have been fabricated by many methods. Dry etching combined with self-assembly masks is widely used because of the convenience of dry etching and high throughput of self-assembly. In this paper, we report a method combining Cesium Chloride (CsCl) self-assembly with inductively coupled plasma (ICP) dry etching to fabricate silicon nanotip arrays with high aspect ratio and silicon nanotip arrays with as… Show more

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Cited by 4 publications
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“…4 On the fabrication side, polyimide sacrificial layers with inclined sidewalls based on reactive ion etching, 5 silicon nanotip arrays with high aspect ratio based on cesium chloride self-assembly and dry etching, 6 anti-adhesion surfaces on aluminium substrates of rubber plastic moulds using a coupling method of liquid plasma 7 and electrochemical machining and super-hydrophobic surfaces on aluminum alloy substrates by RFsputtered polytetrafluoroethylene coatings are presented. 8 Laser-heating wire bonding on MEMS packaging, 9 Spray-coating process in preparing PTFE-PPS composite super-hydrophobic coating 10 and pulse electrodeposition of Fe-Ni alloy are researched; 11 Besides, synthesis of silver particles on copper substrates using ethanol-based solution for surface-enhanced Raman spectroscopy is introduced.…”
mentioning
confidence: 99%
“…4 On the fabrication side, polyimide sacrificial layers with inclined sidewalls based on reactive ion etching, 5 silicon nanotip arrays with high aspect ratio based on cesium chloride self-assembly and dry etching, 6 anti-adhesion surfaces on aluminium substrates of rubber plastic moulds using a coupling method of liquid plasma 7 and electrochemical machining and super-hydrophobic surfaces on aluminum alloy substrates by RFsputtered polytetrafluoroethylene coatings are presented. 8 Laser-heating wire bonding on MEMS packaging, 9 Spray-coating process in preparing PTFE-PPS composite super-hydrophobic coating 10 and pulse electrodeposition of Fe-Ni alloy are researched; 11 Besides, synthesis of silver particles on copper substrates using ethanol-based solution for surface-enhanced Raman spectroscopy is introduced.…”
mentioning
confidence: 99%