Fabrication of Stretchable Single‐Walled Carbon Nanotube Logic Devices

Abstract

The fabrication of a stretchable single-walled carbon nanotube (SWCNT) complementary metal oxide semiconductor (CMOS) inverter array and ring oscillators is reported. The SWCNT CMOS inverter exhibits static voltage transfer characteristics with a maximum gain of 8.9 at a supply voltage of 5 V. The fabricated devices show stable electrical performance under the maximum strain of 30% via forming wavy configurations. In addition, the 3-stage ring oscillator demonstrates a stable oscillator frequency of ∼3.5 kHz at a supply voltage of 10 V and the oscillating waveforms are maintained without any distortion under cycles of pre-strain and release. The strains applied to the device upon deformation are also analyzed by using the classical lamination theory, estimating the local strain of less than 0.6% in the SWCNT channel and Pd electrode regions which is small enough to keep the device performance stable under the pre-strain up to 30%. This work demonstrates the potential application of stretchable SWCNT logic circuit devices in future wearable electronics.

Stretchable Active Matrix Temperature Sensor Array of Polyaniline Nanofibers for Electronic Skin

“…An AM backplane is composed of individual pixels that can be controlled by thin film transistors (TFT). Among the channels of the TFT, single‐walled carbon nanotubes (SWCNTs) have a promising material platform, and SWCNT TFTs with a high conductivity, transparency, and flexibility are fabricated via both solution and chemical vapor deposition (CVD) methods …”

Low‐Voltage Operable and Strain‐Insensitive Stretchable All‐Carbon Nanotube Integrated Circuits with Local Strain Suppression Layer

“…CNT thin films were utilized not only for channel but also for electrodes and interconnections because of their inherent stretchability and high carrier mobility. [15,16,[18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33] CNT TFTs and ICs were fabricated on a stretchable polydimethylsiloxane (PDMS) substrate by a standard lithographybased microprocess. A solution-based transfer process formed the semiconductor thin film consisting of randomly dispersed semiconducting CNTs for the TFT channel on the substrate.…”

Body‐Attachable and Stretchable Multisensors Integrated with Wirelessly Rechargeable Energy Storage Devices

“…The operation of commercially available devices integrated on a single stretchable substrate was also demonstrated by using the wirelessly transmitted power directly onto electrocardiogram sensor without integrated energy storage devices . Previously, we also reported on the fabrication of various stretchable devices including sensors, field effect transistors and microsupercapacitors (MSCs) on deformable substrates . However, there has been no report on the body‐attachable multisensors driven by integrated energy storage devices which can be repeatedly charged with integrated wireless power receiver or energy generators on a single stretchable substrate up to now.…”