Fabrication of SU-8 based microchip electrophoresis with integrated electrochemical detection for neurotransmitters

Castaño‐Álvarez, Mario; Fernández‐Abedul, M. Teresa; Costa-Garcı́a, Agustı́n; Agirregabiria, M.; Fernández, Luís; Ruano-Lopez, Jesus M.; Barredo-Presa, Borja

doi:10.1016/j.talanta.2009.05.049

Cited by 37 publications

(31 citation statements)

References 45 publications

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“…4 Such devices were also directly integrated with optical fibers for the online monitoring of lactate, 5 and with electrochemical sensors for the detection of neurotransmitters. 6 Other functions, such as magnetic bead separation, 7 fluid injection and extraction, 8 and micromanipulation, 9 were all successfully demonstrated using SU-8 microfluidic devices.…”

Section: Introductionmentioning

confidence: 99%

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Sealing SU-8 microfluidic channels using PDMS

et al. 2011

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A simple method of irreversibly sealing SU-8 microfluidic channels using PDMS is reported in this paper. The method is based on inducing a chemical reaction between PDMS and SU-8 by first generating amino groups on PDMS surface using N 2 plasma treatment, then allowing the amino groups to react with the residual epoxy groups on SU-8 surface at an elevated temperature. The N 2 plasma treatment of PDMS can be conducted using an ordinary plasma chamber and high purity N 2 , while the residual epoxy groups on SU-8 surface can be preserved by post-exposure baking SU-8 at a temperature no higher than 95 C. The resultant chemical bonding between PDMS and SU-8 using the method create an interface that can withstand a stress that is greater than the bulk strength of PDMS. The bond is permanent and is long-term resistant to water. The method was applied in fabricating SU-8 microfluidi-photonic integrated devices, and the obtained devices were tested to show desirable performance.

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Section: Introductionmentioning

confidence: 99%

“…SU-8 films deposited on rigid substrates, 4,6,9 PMMA (polymethyl methacrylate) sheets, 10 were used as lids to seal open SU-8 channels. Irreversible sealing, however, was previously only achieved using SU-8-based lids.…”

Section: Introductionmentioning

confidence: 99%

Sealing SU-8 microfluidic channels using PDMS

et al. 2011

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“…Modern developments in the design and utilization of micro fluidic devices for fluid transport have found many applications, ranging from the life science industries for pharmaceuticals and biomedicine (drug discovery, drug delivery and detection, diagnostic devices) [4,5] to industrial applications of combinatorial synthesis (such as, stereoselective synthesis [3], nanoparticle synthesis [6][7][8], rapid in-situ chemical analyses and high throughput screening [9,10]). Hence, there is an urgent need for developing rapid and economically viable prototyping processes for manufacturing micro fluidic devices with suitable materials compatible with the application environment [11,12].…”

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confidence: 99%

“…Building microstructures in 3-D still presents significant challenges when working with the inherently planar geometries that are accessible through projection photolithography [11][12][13][14][15]. Alternatives to photolithography for fabrication schemes that "write" patterns serially in metals and polymers either carve in a wise manner from a solid object or cause localized deposition of material in a series manner [15,16].…”

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confidence: 99%

“…However, when using for these problems [11,12,16]. The developed process by thermal binding two pre-patterned solid SU-8 layers to form multi-level 3-D microstructures needs to overcome the micro gas-gaps between the two solid layers or operate under vacuum and then to form a complete inter-connecting between the two layers, which is usually not a trivial matter [11,12,21].…”

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confidence: 99%

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Fabrication of Multi-level 3-Dimension Microstructures by Phase Inversion Process

Song

2010

Nano-Micro Lett

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One process based on phase inversion of fillers in microstructures for the fabrication of multi-level three-dimensional (3-D) microstructures is described using SU-8, a kind of epoxy photoresist, as the model constructing materials. This process is depicted by use of the routine photolithography technique to construct the top layer of 3-D microstructures on the bottom layer of 3-D microstructures layer by layer. This process makes it possible to fabricate multi-level 3-D microstructures with connectors at desired locations, and to seal long span microstructures (e.g. very shallow channels with depth less than 50 μm and width more than 300 μm) without blockage. In addition, this process can provide a sealing layer by the solidification of a liquid polymer layer, which can be as strong as the bulk constructing materials for microstructures due to a complete contact and cross-linking between the sealing layer and the patterned layers. The hydrodynamic testing indicates that this kind of sealing and interconnection can endure a static pressure of more than 10 MPa overnight and a hydrodynamic pressure drop of about 5.3 MPa for more than 8 hours by pumping the tetrahydrofuran solution through a 60 μm wide micro-channels.

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