Fabrication of sub-micrometric metallic hollow-core structures by laser interference lithography

Pérez, Noemí; Tavera, T.; Rodríguez, Ainara; Ellman, Miguel; Ayerdi, I.; Olaizola, Santiago M.

doi:10.1016/j.apsusc.2012.03.185

Cited by 16 publications

(5 citation statements)

References 21 publications

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“…Manufacturing of periodic surface topography may be executed with DLIL [42,43] using lasers with large power density (from MW/cm 2 to GW/cm 2 ). This method allows for forming micro-and sub-micrometer structures with well defined long range ordering.…”

Section: Laser Treatmentmentioning

confidence: 99%

Laser and chemical surface modifications of titanium grade 2 for medical application

Kwaśniak

Pura

Zwolińska

et al. 2015

Applied Surface Science

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Section: Laser Treatmentmentioning

confidence: 99%

Laser and chemical surface modifications of titanium grade 2 for medical application

Kwaśniak

Pura

Zwolińska

et al. 2015

Applied Surface Science

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“…The recent advances of releasable and transfer printable Si nanomembranes (NMs) [44][45][46][47][48][49][50][51][52][53], still inheriting the single crystal quality of bulk Si, have enabled Si to be applicable to optical devices built on the foreign substrate by printing method [54][55][56][57][58][59]. While there're many photonic crystals made with polymers, amorphous materials, and metals [60][61][62][63][64][65], Si NMs have very high index but the absorption loss is almost negligible, therefore, with Si NMs, a unique and high performance 2D PCS can be realized. In this review, we introduce 2D Si NM PC mirrors built on the glass substrate by transfer printing method as an example [66].…”

Section: Large Area Photonic Applicationsmentioning

confidence: 99%

Nanopatterning by Laser Interference Lithography: Applications to Optical Devices

Seo

Park²,

Kim

et al. 2014

j. nanosci. nanotech.

124

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A systematic review, covering fabrication of nanoscale patterns by laser interference lithography (LIL) and their applications for optical devices is provided. LIL is a patterning method. It is a simple, quick process over a large area without using a mask. LIL is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in a light-sensitive medium that responds nonlinearly to the intensity distribution associated with the interference of two or more coherent beams of light. The photoresist patterns produced with LIL are the platform for further fabrication of nanostructures and growth of functional materials used as the building blocks for devices. Demonstration of optical and photonic devices by LIL is reviewed such as directed nanophotonics and surface plasmon resonance (SPR) or large area membrane reflectors and anti-reflectors. Perspective on future directions for LIL and emerging applications in other fields are presented.

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“…23 P erez fabricated the sub-micrometric metallic hollowcore structures by laser interference lithography. 24 These approaches have demonstrated that laser interference lithography is a promising technology for the fabrication of periodic structures on various materials.…”

Section: Effects Of Polarization On Four-beam Laser Interference Lithmentioning

confidence: 99%

Effects of polarization on four-beam laser interference lithography

Wang¹,

Wang²,

Zhang³

et al. 2013

Applied Physics Letters

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This paper demonstrates that polarization plays an important role in the formation of interference patterns, pattern contrasts, and periods in four-beam interference lithography. Three different polarization modes are presented to study the effects of polarization on four-beam laser interference based on theoretical analysis, simulations, and experiments. A four-beam laser interference system was set up to modify the silicon surface. It was found that the secondary periodicity or modulation was the result of the misaligned or unequal incident angles only in the case of the TE-TE-TM-TM mode. The resulting patterns have shown a good correspondence with the theoretical analysis and simulations.

show abstract

Fabrication of sub-micrometric metallic hollow-core structures by laser interference lithography

Cited by 16 publications

References 21 publications

Laser and chemical surface modifications of titanium grade 2 for medical application

Laser and chemical surface modifications of titanium grade 2 for medical application

Nanopatterning by Laser Interference Lithography: Applications to Optical Devices

Effects of polarization on four-beam laser interference lithography

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