Fabrication of submicron chalcogenide glass photonic crystal by resist-free nanoimprint lithography

Zeng, Jianghui; Zhang, Qian; Zhang, Peiqing; Tang, Junzhou; Xu, Yinsheng; Chen, Feifei; Shen, Xiang; Dai, Shixun

doi:10.1007/s00339-017-1187-8

Cited by 6 publications

(3 citation statements)

References 31 publications

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“…In addition, previous research has shown that using compression molding to fabricate infrared optical elements on chalcogenide glass surfaces can significantly reduce fabrication cost. 5 Up to now, various infrared optical elements were fabricated by compression molding, including infrared Shack-Hartmann sensor, 6 infrared compound eye microlens array imaging system, 7 infrared waveguides, 8 infrared photonic crystal surface, 9 and diffractive microlens arrays. 10 Considering the geometry of the fabricated structures in these research activities, previous studies were focused on surface features with low aspect ratio (ratio between height/depth and width of the feature), negative slope (feature with cone or pyramid shapes), and large/moderate size (around several microns to tens of microns).…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Fabrication of anti-reflective structure array on chalcogenide glass by compression molding with polydimethylsiloxane mold

Chen

2023

Opt. Eng.

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.The feasibility of the proposed new process chain was demonstrated by generating an anti-reflective (AR) structure array with continuous profile on a chalcogenide glass substrate. First, a soft mold made of polydimethylsiloxane (PDMS) was created by casting and lift-off process off a Si master mold with original AR features. The master mold can be reused to create multiple PDMS molds. Afterwards, a nonisothermal compression molding process was conducted using PDMS soft mold to replicate a moderate aspect ratio AR structure array from PDMS mold onto chalcogenide glass surface. PDMS mold was first heated to a low temperature around 190°C such that its rigidity can be maintained, whereas the chalcogenide glass was heated to a relatively higher temperature around 240°C for molding. Surface profiles for both PDMS mold and molded glass were evaluated using both Wyko optical surface profilometer and scanning electron microscope tool. For optical performance, an optical light transmission test was conducted. We demonstrated that PDMS can be a good candidate for mold material in chalcogenide glass compression molding process in replicating large surface arrays with moderate aspect ratio structures.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication of anti-reflective structure array on chalcogenide glass by compression molding with polydimethylsiloxane mold

Chen

2023

Opt. Eng.

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“…1,2 The photonic bandgap (PBG) is one of the most important properties of PCs, which can be used in a variety of photonics applications including wave guiding, 3 optical switches, 4 optical filters, 5 and optical circuits. 6 Many attempts have been made to obtain PC structures with larger PBGs in recent years, [7][8][9] and the hybrid-lattice PC structures 10 were found efficient to enlarge the PBG. Hybrid PC structures, formed by combining two lattices to create multiple periodic geometries with different cell sizes, can reduce symmetry of the PC structures 11 and therefore produce larger PBGs.…”

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confidence: 99%

Electrochemical Fabrication of Silicon-Based Micro-Nano-Hybrid Porous Arrays for Hybrid-Lattice Photonic Crystal

Ge¹,

Lu²,

Zhang³

et al. 2017

ECS J. Solid State Sci. Technol.

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Hybrid-lattice photonic crystals have received extensive attention in photonic device applications for their larger photonic band gaps. However, until now it is time-consuming and money-costing to realize large-area fabrication of hybrid photonic crystal structure at the nanoscale. This paper presents a flexible, effective and costless technique for the fabrication of 2D triangular-honeycomb hybrid-lattice photonic crystal with micro-nano-hybrid porous silicon structure based on the partly oxidized porous silicon (POPS) substrate. Self-positioned nanopore array surrounded with micro-sized macropores was achieved by photoelectrochemical etching on POPS substrate following several microelectrochemical system (MEMS) processing steps including chemical–mechanical polishing and KOH etching. A modified space-charge region (SCR) model was proposed to interpret the underlying mechanism of such self-positioned nanopores formation. Moreover, the dependency of the nanopore size on the morphology of the oxidized trenches with bottle-like widths was studied and a bottleneck effect was proposed. Our work suggests a new way of efficient realization of simple, effective and large-area fabrication of 2D hybrid photonic crystals, which is expected to foster the promotion in high performance photonic devices.

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Formation of a Periodic Structure in a Chalcogenide Film Substrate by Silver Ion Implantation

Kavetskyy

Zubrytska

Stronski

et al. 2018

NATO Science for Peace and Security Series B: Physics and Biophysics

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Fabrication of submicron chalcogenide glass photonic crystal by resist-free nanoimprint lithography

Cited by 6 publications

References 31 publications

Fabrication of anti-reflective structure array on chalcogenide glass by compression molding with polydimethylsiloxane mold

Fabrication of anti-reflective structure array on chalcogenide glass by compression molding with polydimethylsiloxane mold

Electrochemical Fabrication of Silicon-Based Micro-Nano-Hybrid Porous Arrays for Hybrid-Lattice Photonic Crystal

Formation of a Periodic Structure in a Chalcogenide Film Substrate by Silver Ion Implantation

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