Fabrication of surface acoustic wave wireless pressure sensor

Hermelin, D.; Daniaux, W.; Ballandras, S.; Belgacem, B.

doi:10.1109/freq.2009.5168149

Cited by 9 publications

(7 citation statements)

References 1 publication

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…1 lists the pressure sensitivities of SAW pressure sensors reported in some typical works. It can be found that the sensitivity in this work is higher than that reported in [3][4][5][6] and [13,14]. Then it is interesting to investigate the reasons for the high pressure sensitivity of our SAW pressure sensor.…”

Section: Resultsmentioning

confidence: 60%

See 1 more Smart Citation

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Yang,

Peng,

Sun

et al. 2023

J. Phys.: Conf. Ser.

View full text Add to dashboard Cite

In this work, a SAW pressure sensor based on a simply supported beam was designed and fabricated. The SAW resonator deposited on 128° YX-lithium niobate (LNO) substrate was used as the sensing element. The LNO substrate was used as a simply supported beam, therefore strain transfer loss was avoided and uniaxial stress was directly applied to the SAW resonator. An indenter with two ledges was used to indent the LNO beam and then uniform strain was applied to the SAW resonator. The sensitivity was experimentally measured in a pressure range of 330 kPa. The results demonstrated that the sensitivity of the SAW pressure sensor in this work was as high as 2514 ppm/MPa. The high pressure sensitivity of the proposed SAW pressure sensor was analyzed. The device structure of the proposed SAW pressure sensor may help to design highly sensitive SAW pressure sensors.

show abstract

Section: Resultsmentioning

confidence: 60%

“…On the other hand, the SAW pressure sensors reported in [3][4][5][6] and [13,14] are diaphragm-type SAW pressure sensors, which means that the SAW resonator was fabricated or pasted on the diaphragm. According to Sinha's research [8], the pressure subjected to the diaphragm could be regarded as biaxial stress (strain).…”

Section: Resultsmentioning

confidence: 99%

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Yang,

Peng,

Sun

et al. 2023

J. Phys.: Conf. Ser.

View full text Add to dashboard Cite

show abstract

“…The identification of the resonance frequency allows for recovering the physical quantity under investigation via conversion coefficients and physical relations. A parabolic frequency-temperature law is generally used to derive the temperature to which the sensor is submitted [17], whereas linear relations are used for determining torque [18] or pressure [19] via SAW stress sensitivity coefficients. Assuming a properly designed transducer, our investigation focuses on the packaging of the sensor to be operated in a high temperature environment.…”

Section: Surface Acoustic Wave Interrogation Principlementioning

confidence: 99%

High temperature packaging for surface acoustic wave transducers acting as passive wireless sensors

Bart¹,

Friedt²,

Martin³

et al. 2015

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

a b s t r a c tNumerous developments have been dedicated these passed years to demonstrate the use of surface acoustic wave (SAW) devices as passive sensors probed through a wireless radio-frequency link. Giving access to physical parameter variations without embedded power supply, recent works have shown that SAW sensors can be used under harsh environments such as temperatures in excess of 300 • C and much more. The purpose of this paper is to present a new packaging process for SAW sensors operating under temperature environments up to 600 • C. The robustness of this packaging process is first validated at the above-mentioned temperature using a classical temperature probe via wired connection. The reliability of this process applied to differential SAW sensors then is demonstrated by wireless interrogation of a quartz-based SAW differential sensor from room temperature to 480 • C. The sensor operation has been validated for several tens of hours without major failure nor significant deviation, although the measurement distance dynamic range is observed to be dramatically reduced with operating on such a wide temperature range.

show abstract

“…Parallèlement au développement du capteur à 2,45 GHz, un capteur à 434 MHz utilisant un résonateur à ondes de Rayleigh a donc été conçu et fabriqué [6]. Une tranche de quartz sur laquelle on a au préalable réalisé un résonateur est scellée sur une tranche de silicium usiné.…”

Section: Résultats De Mesure à L'aide D'un Capteur De Pression à 434 unclassified

Capteur SAW implantable dédié à la télémesure de la température et de la pression artérielle : le projet ANR-TECSAN CIMPA

Tourette¹,

Chommeloux²,

Guen³

et al. 2010

IRBM

Self Cite

View full text Add to dashboard Cite

Reçu le 18 février 2010 ; accepté le 18 février 2010 Disponible sur Internet le 7 avril 2010 RésuméLe projet CIMPA (2007)(2008), réalisé dans le cadre de l'appel ANR-TECSAN, a été coordonné par SENSeOR, en partenariat avec le LEAT et le FEMTO. Son objectif était la mise au point d'un démonstrateur de capteur surface acoustic waves (SAW) passif, implantable, permettant de mesurer la pression artérielle ainsi que la température. Ce capteur utilise la technologie des ondes acoustiques de surface (SAW) et est composé de trois résonateurs sur quartz. Un premier résonateur pour la mesure de température (T), un second résonateur pour la mesure de la pression sanguine (P) et un troisième résonateur qui sert de référence (R). Ce capteur est compatible des exigences d'encombrement inhérentes à une implantation dans une artère puisque la taille du résonateur avec ses antennes, dans sa configuration la plus compacte, est de l'ordre 5,2 mm × 3,7 mm × 0,85 mm. Il ne nécessite aucune source d'énergie embarquée et peut être interrogé via une liaison radiofréquence (RF) grâce à un interrogateur qui émet un signal dans la bande industriel, scientifique et médical (ISM). Le capteur sollicité par le signal d'interrogation, via son antenne intégrée de très petite dimension, émet à son tour un signal qui porte les informations de pression et de température vues par ce dernier. L'interrogateur capte alors le signal émis par le capteur et en extrait, via un traitement du signal adapté, les informations de pression et de température. La gamme de mesure de pression s'étend de 1 bar à 1,35 bar avec une précision de l'ordre de 2 %. AbstractThe CIMPA Project (2007)(2008), led under the ANR-TECSAN Call, was coordinated by SENSeOR, in partnership with the LEAT and the FEMTO. The aim of the project was to develop a surface acoustic wave sensor demonstrator, passive implantable to monitoring the blood pressure and the temperature. This sensor uses the surface acoustic wave technology (SAW) and is composed of three resonators using quartz as piezoelectric substrate. One resonator for temperature measurement (T), a second resonator for the blood pressure measurement (P) and a third resonator, which is used as reference (R). This sensor is compatible with size requirements inherent to an implantation in an artery, since the size of the resonator with its antennas in its most compact configuration is of the order of 5.2 mm × 3.7 mm × 0.85 mm. It requires no embarked sources of energy and being able to be interrogated by a radiofréquence (RF) connection thanks to a transceiver, which emits a signal in the band industrial, scientific and medical (ISM). The sensor (connected to an integrated antenna on quartz of very small dimension) requested by the signal of interrogation * Auteur correspondant.Adresse emits in its turn a signal, which carries information of pressure and temperature. The transceiver then collects apart from its transmitting phase the signal emitted by the sensor and extracts by an appropriate signal processing method information of p...

show abstract

Fabrication of surface acoustic wave wireless pressure sensor

Cited by 9 publications

References 1 publication

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

High temperature packaging for surface acoustic wave transducers acting as passive wireless sensors

Capteur SAW implantable dédié à la télémesure de la température et de la pression artérielle : le projet ANR-TECSAN CIMPA

Contact Info

Product

Resources

About