Fabrication of suspended metal–dielectric–metal plasmonic nanostructures

Dong, Zhaogang; Bosman, Michel; Zhu, Dongmei; Goh, Xiao Ming; Yang, Joel K. W.

doi:10.1088/0957-4484/25/13/135303

Cited by 20 publications

(14 citation statements)

References 43 publications

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“…We employed the electron-beam lithography (EBL) and a lift-off process to fabricate the gold nanodisk samples on SiO 2 /Si substrates 47 , where a 100 nm-thick SiO 2 layer was used for reducing plasmon damping. The gold film (30 nm thick) and the underlying Cr adhesion layer (1 nm thick) were deposited on the SiO 2 /Si substrate through the electron-beam evaporation.…”

Section: Methodsmentioning

confidence: 99%

In-plane coherent control of plasmon resonances for plasmonic switching and encoding

et al. 2019

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AbsractConsiderable attention has been paid recently to coherent control of plasmon resonances in metadevices for potential applications in all-optical light-with-light signal modulation and image processing. Previous reports based on out-of-plane coherent control of plasmon resonances were established by modulating the position of a metadevice in standing waves. Here we show that destructive and constructive absorption can be realized in metallic nano-antennas through in-plane coherent control of plasmon resonances, which is determined by the distribution rule of electrical-field components of nano-antennas. We provide proof-of-principle demonstrations of plasmonic switching effects in a gold nanodisk monomer and dimer, and propose a plasmonic encoding strategy in a gold nanodisk chain. In-plane coherent control of plasmon resonances may open a new avenue toward promising applications in optical spectral enhancement, imaging, nanolasing, and optical communication in nanocircuits.

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Section: Methodsmentioning

confidence: 99%

In-plane coherent control of plasmon resonances for plasmonic switching and encoding

et al. 2019

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“…In this work, we provide experimental and theoretical evidence of true BIC resonances that are locally excited by a nanometer electron beam in the STEM and directly probed using EELS and CL spectroscopy. Localized plasmonic optical transitions have been investigated before in the STEM [36][37][38][39] . The electron microscope was shown to provide a unique combination of broadband, near-field excitation, wide-range spectroscopy, and ultrahigh spatial resolution, enabling a comprehensive analysis of optical resonances.…”

Section: Introductionmentioning

confidence: 99%

Nanoscale mapping of optically inaccessible bound-states-in-the-continuum

et al. 2022

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Bound-states-in-the-continuum (BIC) is an emerging concept in nanophotonics with potential impact in applications, such as hyperspectral imaging, mirror-less lasing, and nonlinear harmonic generation. As true BIC modes are non-radiative, they cannot be excited by using propagating light to investigate their optical characteristics. In this paper, for the 1st time, we map out the strong near-field localization of the true BIC resonance on arrays of silicon nanoantennas, via electron energy loss spectroscopy with a sub-1-nm electron beam. By systematically breaking the designed antenna symmetry, emissive quasi-BIC resonances become visible. This gives a unique experimental tool to determine the coherent interaction length, which we show to require at least six neighboring antenna elements. More importantly, we demonstrate that quasi-BIC resonances are able to enhance localized light emission via the Purcell effect by at least 60 times, as compared to unpatterned silicon. This work is expected to enable practical applications of designed, ultra-compact BIC antennas such as for the controlled, localized excitation of quantum emitters.

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“…Electron beam exposure was then carried out with an acceleration voltage of 100 keV and a beam current of 100 pA, with an exposure dosage of ∼5 mC/cm 2 . 50 After the electron beam exposure, the PMMA sample was developed in the methyl isobutyl ketone (MIBK) and isopropyl alcohol (IPA) solution with a volume mixing ratio of 1:3, at a temperature of −10 °C for 15 s, 51 followed by blow drying the sample with nitrogen.…”

Section: Discussionmentioning

confidence: 99%

Reversible Tuning of Mie Resonances in the Visible Spectrum

Dong

Tijiptoharsono

et al. 2021

ACS Nano

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Dielectric optical nanoantennas are promising as fundamental building blocks in next generation color displays, metasurface holograms, and wavefront shaping optical devices. Due to the high refractive index of the nanoantenna material, they support geometry-dependent Mie resonances in the visible spectrum. Although phase change materials, such as the germanium–antimony–tellurium alloys, and post-transition metal oxides, such as ITO, have been used to tune antennas in the near-infrared spectrum, reversibly tuning the response of dielectric antennas in the visible spectrum remains challenging. In this paper, we designed and experimentally demonstrated dielectric nanodisc arrays exhibiting reversible tunability of Mie resonances in the visible spectrum. We achieved tunability by exploiting phase transitions in Sb2S3 nanodiscs. Mie resonances within the nanodisc give rise to structural colors in the reflection mode. Crystallization and laser-induced amorphization of these Sb2S3 resonators allow the colors to be switched back and forth. These tunable Sb2S3 nanoantenna arrays could enable the next generation of high-resolution color displays, holographic displays, and miniature LiDAR systems.

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Fabrication of suspended metal–dielectric–metal plasmonic nanostructures

Cited by 20 publications

References 43 publications

In-plane coherent control of plasmon resonances for plasmonic switching and encoding

In-plane coherent control of plasmon resonances for plasmonic switching and encoding

Nanoscale mapping of optically inaccessible bound-states-in-the-continuum

Reversible Tuning of Mie Resonances in the Visible Spectrum

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