Fabrication of tapered waveguides by i-line UV lithography for flexible coupling control

Wang, Pei-Hsun; Lee, Tien-Hsiang; Huang, Wei‐Hao

doi:10.1364/oe.473623

“…The detailed processes are described in Ref. 25 . Figure 1 shows the microscope (OM) images and the schematic of the Si 3 N 4 waveguide resonators.…”

Section: Waveguide Resonator Fabrication and Optical Measurementmentioning

confidence: 99%

“…Figure 2 a depicts the transmission spectra of these waveguide resonators prior to femtosecond laser annealing. By fitting the cavity resonance 25 of the observed spectra, the intrinsic Q factors can be then determined. In our pursuit of a high-Q device, a waveguide width of 3 μm is adapted to minimize the effect on sidewall roughness but it also allows the oscillation of higher-order modes.…”

Section: Waveguide Resonator Fabrication and Optical Measurementmentioning

confidence: 99%

Refining silicon nitride waveguide quality through femtosecond laser annealing

Wang,

Chen,

Hou

et al. 2024

Sci Rep

0

View full text Add to dashboard Cite

We present a method for modification of silicon nitride (Si3N4) waveguide resonators using femtosecond laser annealing. The quality (Q) factor of the waveguide resonators can be improved by approximately 1.3 times after annealing. Notably, waveguides that originally had a high Q value maintained their quality after the annealing process. However, those with a lower initial Q value experienced a noticeable improvement post-annealing. To characterize the annealing effect, the surface morphologies of Si3N4 films, both pre- and post-annealing, were analyzed using atomic force microscopy. The findings suggest a potential enhancement in surface refinement. Furthermore, Raman spectroscopy confirmed that the Si3N4 film's composition remains largely consistent with its original state within the annealing power range of 0.6–1.6 W. This research underscores the potential of femtosecond laser annealing as an efficient, cost-effective, and localized technique for fabricating low-loss integrated photonics.

show abstract

“…Optical taper waveguides hold a crucial role in integrated optics, seamlessly connecting waveguides with diverse dimensions or attributes. They gradually adjust cross-sectional dimensions through careful design to achieve efficient light transmission while minimizing losses [31]. Taper waveguides enhance the overall connectivity and performance of integrated photonic systems by enabling a smooth transition between waveguides.…”

Section: Length and Width Of MMI Optimizationmentioning

confidence: 99%

Near-infrared polymer Y-branch splitters with compact MMI structures for efficient power splitting

Afsary,

Alam,

Sikder

et al. 2023

Preprint

0

View full text Add to dashboard Cite

This research presents a novel strategy for enhancing optical network efficiency by implementing a taper-based single-mode step-index (SI) core polymer Y-branch multimode interference (MMI) splitter. The innovative splitter design offers notable benefits in terms of performance, cost-effectiveness, and scalability. By capitalizing on the inherent attributes of the polymer material, including its minimal propagation losses and flexibility, we meticulously engineer this Y-Branch MMI polymer splitter. A 5 μm core width is purposefully maintained in the input and output components to uphold single-mode conditions. Embracing the self-imaging principle, the design and optimization of this Y-branch splitter are conducted employing the beam propagation method at a 1.55 μm wavelength. SI MMI splitters achieve a commendable power splitting efficiency of 86%. Our examination shows an excess loss of 0.52 dB and 0.50 dB for TE and TM modes, respectively. Furthermore, the calculated polarization dependence loss (PDL) is 0.015 dB, with a propagation loss of only 0.00019 dB/μm.

show abstract

“…Optical taper waveguides hold a crucial role in integrated optics, seamlessly connecting waveguides with diverse dimensions or attributes. They gradually adjust cross-sectional dimensions through careful design to achieve efficient light transmission while minimizing losses [31]. Taper waveguides enhance the overall connectivity and performance of integrated photonic systems by enabling a smooth transition between waveguides.…”

Section: Length and Width Of MMI Optimizationmentioning

confidence: 99%

Near-infrared polymer Y-branch splitters with compact MMI structures for efficient power splitting

Afsary,

Alam,

Sikder

et al. 2023

Preprint

0

View full text Add to dashboard Cite

This research presents a novel strategy for enhancing optical network efficiency by implementing a taper-based single-mode step-index (SI) core polymer Y-branch multimode interference (MMI) splitter. The innovative splitter design offers notable benefits in terms of performance, cost-effectiveness, and scalability. By capitalizing on the inherent attributes of the polymer material, including its minimal propagation losses and flexibility, we meticulously engineer this Y-Branch MMI polymer splitter. A 5 μm core width is purposefully maintained in the input and output components to uphold single-mode conditions. Embracing the self-imaging principle, the design and optimization of this Y-branch splitter are conducted employing the beam propagation method at a 1.55 μm wavelength. SI MMI splitters achieve a commendable power splitting efficiency of 86%. Our examination shows an excess loss of 0.52 dB and 0.50 dB for TE and TM modes, respectively. Furthermore, the calculated polarization dependence loss (PDL) is 0.015 dB, with a propagation loss of only 0.00019 dB/μm.

show abstract

Fabrication of tapered waveguides by i-line UV lithography for flexible coupling control

Cited by 9 publications

References 36 publications

Refining silicon nitride waveguide quality through femtosecond laser annealing

Refining silicon nitride waveguide quality through femtosecond laser annealing

Near-infrared polymer Y-branch splitters with compact MMI structures for efficient power splitting

Near-infrared polymer Y-branch splitters with compact MMI structures for efficient power splitting

Contact Info

Product

Resources

About