Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8

Williams, Henry E.; Freppon, Daniel J.; Kuebler, Stephen M.; Rumpf, Raymond C.; Melino, Marco A.

doi:10.1364/oe.19.022910

Cited by 90 publications

(55 citation statements)

References 20 publications

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“…Using femtosecond laser pulses and two-photon absorption, this manufacturing method takes 3D printing down to submicrometre feature sizes and therefore pushes the ongoing trend of miniaturization forwards. Direct laser writing with highly transparent photoresists enables 3D printing to enter the realm of manufacturing optical elements at the micro-and nanometre scale [16][17][18][19][20][21][22] . Thus the precise fabrication of complex optical elements on demand becomes possible.…”

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confidence: 99%

Two-photon direct laser writing of ultracompact multi-lens objectives

et al. 2016

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Current lens systems are restricted in size, shape and dimensions by limitations of manufacturing. Multi-lens elements with non-spherical shapes are required for high optical performance and to correct for aberrations when imaging at wide angles and large fields. Here we present a novel concept in optics that overcomes all of the aforementioned difficulties and opens the new field of 3D printed micro-and nano-optics with complex lens designs. We demonstrate the complete process chain, from optical design, manufacturing by femtosecond two-photon direct laser writing and testing to the application of multi-lens objectives with sizes around 100 µm, and validate their high performance and functionality by quantitative measurements of the modulation transfer function and aberrations. The unprecedented flexibility of our method paves the way towards printed optical miniature instruments such as endoscopes, fibre-imaging systems for cell biology, new illumination systems, miniature optical fibre traps, integrated quantum emitters and detectors, and miniature drones and robots with autonomous vision.A dditive manufacturing enables new and unprecedented engineering and production possibilities that are predicted to have an enormous impact in the twenty-first century. The technology allows for the simple three-dimensional (3D) printing of volumetric objects directly from a computer-aided design 1 . So far, additively manufactured objects are mostly fabricated from metals, ceramics and opaque plastics. There are a number of different fabrication methods to manufacture small and high-performance micro-optical systems 2-10 ; however, these technologies suffer from drawbacks such as limited miniaturization, inability to combine multiple elements, restrictions in designing the surfaces 2-4,11 and problems with the alignment 12 .Multiphoton lithography is one of various 3D printing technologies that realize the fabrication of 3D objects 13-15 . Using femtosecond laser pulses and two-photon absorption, this manufacturing method takes 3D printing down to submicrometre feature sizes and therefore pushes the ongoing trend of miniaturization forwards. Direct laser writing with highly transparent photoresists enables 3D printing to enter the realm of manufacturing optical elements at the micro-and nanometre scale [16][17][18][19][20][21][22] . Thus the precise fabrication of complex optical elements on demand becomes possible.We demonstrate that 3D direct laser writing is a suitable tool for fabricating complex multi-lens optical systems that show high optical performances and tremendous compactness. Until now multi-lens optics that have comparable performances are considerably larger 12,23 and at the same time do not show the manifold compound structures and possibilities presented here. Our optical devices consist of several different free-form lens elements with air in between. This work is right at the interface between microand nano-optics and represents a paradigm shift for micro-optics. It takes only a few hours from lens desig...

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Two-photon direct laser writing of ultracompact multi-lens objectives

et al. 2016

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“…The environmental humidity and pressure could be measured by introducing amplitude modulation to excite the vibrations of the device for resonance curve measurement. Various refractive lenses, a compound lens system, and a woodpile photonic crystal within the resin on the end-face of the optical fiber are fabricated by the DLW method [226]. These devices could find applications such as in low insertion-loss micro-laser couplers, high efficiency optical fiber couplers, fiber output beam shapers, and a new class of optical sensors.…”

Section: Other Methods Based Micro-machined Devicesmentioning

confidence: 99%

Recent Developments in Micro-Structured Fiber Optic Sensors

Chen

et al. 2017

Fibers

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Recent developments in fiber-optic sensing have involved booming research in the design and manufacturing of novel micro-structured optical fiber devices. From the conventional tapered fiber architectures to the novel micro-machined devices by advanced laser systems, thousands of micro-structured fiber-optic sensors have been proposed and fabricated for applications in measuring temperature, strain, refractive index (RI), electric current, displacement, bending, acceleration, force, rotation, acoustic, and magnetic field. The renowned and unparalleled merits of sensors-based micro-machined optical fibers including small footprint, light weight, immunity to electromagnetic interferences, durability to harsh environment, capability of remote control, and flexibility of directly embedding into the structured system have placed them in highly demand for practical use in diverse industries. With the rapid advancement in micro-technology, micro-structured fiber sensors have benefitted from the trends of possessing high performance, versatilities and spatial miniaturization. Here, we comprehensively review the recent progress in the micro-structured fiber-optic sensors with a variety of architectures regarding their fabrications, waveguide properties and sensing applications.

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“…It is therefore tempting to fabricate the LMRG directly on cleaved or polished fibre facets. Several technologies were examined for micromachining of fibre facets such as interference lithography (Yang et al 2012), photolithography (Johnson et al 2003), electron-beam lithography , focused ion-beam milling (Schiappelli et al 2004;Vanek et al 2016), stamping (Sanghera et al 2010;MacLeod et al 2011), nano-imprint technology (Kostovski et al 2009;Kanamori et al 2013), two-photon polymerization 3D printing (Williams et al 2011;Gissibl et al 2016a, b), direct laser writing (Kowalczyk et al 2014). …”

Section: Introductionmentioning

confidence: 99%

Leaky-mode resonant gratings on a fibre facet

2018

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Numerical investigation shows that an optimised leaky-mode resonant diffraction gratings fabricated in Ta 2 O 5 layer deposited on the facet of an optical fibre can have a modal reflectance peak of more than 95%, 3 dB spectral bandwidth of about 50 nm and polarization extinction ratio of almost 18 dB. The grating is intended to be employed as a high-reflectance, wavelength-and polarization-dependent mirror in a fibre laser. We compare results of 2D and 3D modelling, investigate influence of grating parameters on spectral shape of modal reflectance and discuss fabrication tolerances.

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Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8

Cited by 90 publications

References 20 publications

Two-photon direct laser writing of ultracompact multi-lens objectives

Two-photon direct laser writing of ultracompact multi-lens objectives

Recent Developments in Micro-Structured Fiber Optic Sensors

Leaky-mode resonant gratings on a fibre facet

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