Fabrication of two-dimensional photonic crystals with controlled defects by use of multiple exposures and direct write

Pang, Lin; Nakagawa, Wataru; Fainman, Yeshaiahu

doi:10.1364/ao.42.005450

Cited by 74 publications

(39 citation statements)

References 12 publications

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“…We expect that the localization of the optical excitations would lead to ready integration of the solid state cavity devices with extant devices. Advances relevant to our proposal in semiconductor quantum devices include single photon sources operating at room temperature [10,11],high-Q microsheres and their coupling to nanodots [4] and to fibers [12], and photonic lattice waveguides and cavities [13,14].…”

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confidence: 99%

Nanodot-Cavity Electrodynamics and Photon Entanglement

2004

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Quantum electrodynamics of excitons in a cavity is shown to be relevant to quantum operations. We present a theory of an integrable solid-state quantum controlled-phase gate for generating entanglement of two photons using a coupled nanodot-microcavity-fiber structure. A conditional phase shift of O(π/10) is calculated to be the consequence of the giant optical nonlinearity keyed by the excitons in the cavities. Structural design and active control, such as electromagnetic induced transparency and pulse shaping, optimize the quantum efficiency of the gate operation.PACS numbers: 78.67. Hc, 42.50.Pq, 03.67.Mn, 42.50.Hz Semiconductor nanodot plays a key role in nanoscience as has been demonstrated by the electrical control of transport [1] and the optical control of quantum operations [2]. Following the study of quantum electrodynamics of atoms in cavity (CQED) [3], effort is underway in the study of CQED of excitons in nanodots [4]. We report here the results of a theoretical study of excitons in CQED as illustrated by the proposal of a solid state controlled phase gate which entangles two photons.Entangled photon pairs are the main stay of quantum information processing [5] and the controlled gate which conditions the dynamics of one photon on the state of the other also enables a key logic operation for quantum computation. There are two approaches to realize such gates: (1) linear optics with projective measurements [6] and (2) nonlinear optics at the discrete photon level. The logic gate working with few-photon nonlinear optics requires impractical interaction length (e.g. several meters) in conventional Kerr media [7]. To obtain giant optical nonlinearity for a two-photon logic gate, novel schemes have been demonstrated, e.g. the atom-cavity QED [8], or proposed, e.g. slow light in a coherently prepared atomic gas exhibiting electromagnetically induced transparency (EIT) [9].The relevance of excitons in CQED is strengthened by the recent advances in solid state photonics and optoelectronics. We expect that the localization of the optical excitations would lead to ready integration of the solid state cavity devices with extant devices. Advances relevant to our proposal in semiconductor quantum devices include single photon sources operating at room temperature [10,11],high-Q microsheres and their coupling to nanodots [4] and to fibers [12], and photonic lattice waveguides and cavities [13,14].The qubit in our scheme is represented by two polarization states of a photon. In a quantum controlled phase gate, a two-photon state acquires a phaseshift conditional to their polarization configuration. The arrangement of our proposed device is given in Fig. 1(a). Two photons traveling along two optical fibers receive their interaction by coupling to two silicon microsphere cavities which are joined by a doped nanodot. The dot provides in theory[15] a strong third-order optical nonlinearity which is essential for a controlled interaction between two photons. Two cavities of different resonant frequencies are needed ...

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confidence: 99%

Nanodot-Cavity Electrodynamics and Photon Entanglement

2004

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“…An example two-beam configuration to record a 1D grating utilizing a single beam splitter and beam-directing mirrors is depicted in Figure 4(a). In any two-beam configuration, multiple exposures are required to generate more complex 2D and 3D patterns in a photo-sensitive material [76][77][78][79]. This is often accomplished by incorporating a rotating sample stage at the recording plane [80][81][82][83].…”

Section: Multi-beam Interference Configurationsmentioning

confidence: 99%

“…Two decades later, multiple MBIL exposures were proposed to generate more complex 2D patterns in a photoresist [138]. Since then, a wide range of structures have been recorded via MBIL using near-infrared [129,[139][140][141][142], visible light [18,31,32,62,88,[143][144][145][146][147][148][149][150][151][152][153], ultraviolet (UV) [62,77,78,99,115,[154][155][156][157][158][159][160], deep-UV [92,101,142,[161][162][163], and extreme-UV sources [164][165][166][167].…”

Section: Multi-beam Interference Lithography and Nano-electronicsmentioning

confidence: 99%

“…Similarly, Figure 6(b) demonstrates a multi-step procedure to create more complex composite patterns. Others have combined MBIL with various lithographic techniques including other mask-based techniques (e.g., proximity or contact lithography) [159,173], electron-beam lithography [81,174,175], electron-beam-induced deposition [176], focused ion-beam lithography [155,177], direct laser writing [77,150,178,179], atomic force microscopy nano-indentation [180], and multi-photon polymerization [181][182][183]. For example, interference lithography has been combined with optical contact lithography to fabricate triple-gate metal-oxide-semiconductor field effect transistors [161].…”

Section: Multi-beam Interference Lithography and Nano-electronicsmentioning

confidence: 99%

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Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

Burrow

Gaylord

2011

Micromachines

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Abstract:Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the micro-and nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials using multi-beam interference lithography (MBIL) to accomplish subwavelength patterning. Advances in MBI and MBIL and a very wide range of applications areas including nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures are reviewed and put into a unified perspective.

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“…(63,66,67) In practice, it is much more convenient to arrange two beams with different geometries to access a wide range of lattices with variable unit sizes and large contrast. For example, both square and tetragonal 2D lattices can be attained by simply rotating the sample stage with a precise control of the in-plane rotation of the substrate.…”

Section: Formation Of Two-dimensional (2d) Microstructuresmentioning

confidence: 99%

Creating Three‐Dimensional Polymeric Microstructures by Multi‐Beam Interference Lithography

Moon

Yang

2005

Journal of Macromolecular Science, Part C: Polymer Reviews

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It is attractive to produce true three-dimensional (3D) microstructures both rapidly and economically over a large area with negligible defects for a wide range of applications. Multi-beam interference lithography is one of the promising techniques that can create periodic microstructures in polymers without extensive lithography and etching steps. This review discusses the formation of interference patterns, their dependence on beam parameters, the lithographic process, and the applications to the formation of photonic crystals. Various photoresist systems, including thick films of negative-tone and positive-tone photoresists, liquid resins, organic-inorganic hybrids, and holographic polymer-dispersed liquid crystals, are also reviewed.

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Fabrication of two-dimensional photonic crystals with controlled defects by use of multiple exposures and direct write

Cited by 74 publications

References 12 publications

Nanodot-Cavity Electrodynamics and Photon Entanglement

Nanodot-Cavity Electrodynamics and Photon Entanglement

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

Creating Three‐Dimensional Polymeric Microstructures by Multi‐Beam Interference Lithography

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