Fabrication of waveguide spatial light modulators via femtosecond laser micromachining

Savidis, Nickolaos; Jolly, Sundeep; Datta, Bianca; Karydis, Thrasyvoulos; Bove, V. Michael

doi:10.1117/12.2209651

Cited by 3 publications

(3 citation statements)

References 29 publications

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“…The result is that relatively high contrast gratings can be formed in the substrate with critical dimensions down below a micron and write depth of several tens of microns (see Figure 3). When coupled with high-accuracy, large-travel stages, whole wafers can be written with sub-surface gratings [10][11][12]. These gratings can be uniform, chirped, Raman-Nath, or Bragg grating.…”

Section: Introductionmentioning

confidence: 99%

Static Structures in Leaky Mode Waveguides

2019

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Featured Application: The overarching contextual objective of this research is to create transparent, near-eye devices for holographic video display. Abstract:In this work, we suggest a new method of expanding the field of view in bottom-exit, leaky mode devices for transparent, monolithic, holographic, near-eye display. In this approach, we propose the use of static, laser-induced, grating structures within the device substrate to break the leaky mode light into diffracted orders. We then propose to use carefully timed illumination pulses to select which diffracted order is visible to the eye at every display refresh interval (up to 100 kHz). Each of these orders becomes a view for a different image point. To describe this new method, we use K-vector analysis. We give the relevant equations and a list of parameters which lead to a near-eye geometry with little or no overlap in higher-order view zones. We conclude that it should be possible to increase the field of view of our bottom-exit, leaky mode devices by as much as one order of magnitude by simply adding a laser-induced grating structure to the substrate and by carefully timing the device illumination. If successful, this method would make possible a transparent, holographic, near-eye display that is simple to fabricate, relative to pixelated approaches, and which has a wide field-of-view relative to our current bottom-exit displays.

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Section: Introductionmentioning

confidence: 99%

Static Structures in Leaky Mode Waveguides

2019

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“…We have previously depicted a fabrication methodology for such a device based on femtosecond laser micromachining of waveguides. 18,19 In this paper, we depict progress in fabrication of volume Bragg gratings in lithium niobate for application in light outcoupling via femtosecond laser micromachining.…”

Section: Introductionmentioning

confidence: 99%

Progress in fabrication of anisotropic Bragg gratings fabricated in lithium niobate via femtosecond laser micromachining

Jolly

Savidis

Datta

et al. 2018

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI

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We have previously introduced a femtosecond laser micromachining-based scheme for the fabrication of anisotropic waveguides and isotropic Bragg reflection gratings in lithium niobate for application in future integrated-optic spatial light modulators. In this paper, we depict progress in fabrication and characterization of anisotropic Bragg reflection gratings fabricated in lithium niobate via Type I femtosecond laser-based permittivity modulation. We furthermore depict an electromagnetic analysis of such multilayer grating structures based around coupled-wave theory for thick holographic gratings.

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“…There are five primary parameters that affect the resolution and thus the accuracy of our point ionization. 7 These parameters are: 1) The spot size due to the NA of the objective lens, 2) the light intensity, 3) the exposure time / repetition rate, 4) the wavelength of the femtosecond pulses, and 5) material selection. Here we present a system that controls all five of these primary parameters.…”

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confidence: 99%

Progress in fabrication of waveguide spatial light modulators via femtosecond laser micromachining

et al. 2017

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We have previously introduced a femtosecond laser micromachining-based scheme for the fabrication of anisotropic waveguides in lithium niobate for use in a guided-wave acousto-optic spatial light modulator. This spatial light modulation scheme is extensible to off-plane waveguide holography via the integration of a Bragg reflection grating. In this paper, we present femtosecond laser-based direct-write approaches for the fabrication of (1) waveguide in-coupling gratings and (2) volume Bragg reflection gratings via permanent refractive index changes within the lithium niobate substrate. In combination with metal surface-acoustic-wave transducers, these direct-write approaches allow for complete fabrication of a functional spatial light modulator via femtosecond laser direct writing.

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Fabrication of waveguide spatial light modulators via femtosecond laser micromachining

Cited by 3 publications

References 29 publications

Static Structures in Leaky Mode Waveguides

Static Structures in Leaky Mode Waveguides

Progress in fabrication of anisotropic Bragg gratings fabricated in lithium niobate via femtosecond laser micromachining

Progress in fabrication of waveguide spatial light modulators via femtosecond laser micromachining

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