Fabrication of WO₃ Nanocone Arrays for Highly Sensitive C₂H₆ Gas Sensor Integrated with Low Powered in Plane Microheater

A Highly Sensitive and Stable rGO:MoS2-Based Chemiresistive Humidity Sensor Directly Insertable to Transformer Insulating Oil Analyzed by Customized Electronic Sensor Interface

“…Figure shows the preparation of the composites and the fabrication procedure of the developed sensors. First, a negative photoresist (PR, AZ5214E) was spin-coated on a 4″ quartz wafer and patterned via UV lithography for the sensing IDE, temperature sensor, and in-plane microheater . Next, 20/100 nm-thick Ti/Pt was deposited onto the surface using an e-beam evaporator, followed by a lift-off process in the microstriper, leaving only Ti/Pt patterns on the wafer.…”

“…First, a negative photoresist (PR, AZ5214E) was spin-coated on a 4″ quartz wafer and patterned via UV lithography for the sensing IDE, 31 temperature sensor, 32 and in-plane microheater. 33 Next, 20/100 nmthick Ti/Pt was deposited onto the surface using an e-beam evaporator, followed by a lift-off process in the microstriper, leaving only Ti/Pt patterns on the wafer. After that, a 1 μm-thick SiO 2 was deposited onto all the surfaces via plasma-enhanced chemical vapor deposition (PECVD) as a shield layer against oil and other environmental interferences, followed by a selective dry etching of the deposited SiO 2 to reveal the IDEs and electrode pads using reactive ion etching (RIE) and PR masking layer, and then dicingsawing into individual pieces.…”