A 440 MHz wireless and passive surface acoustic wave (SAW) chemical sensor was developed for
CO2
detection. The developed SAW gas sensor is composed of single phase
unidirectional transducers (SPUDTs), three shorted grating reflectors, and
CO2-sensitive
polymer film on 41°
YX LiNbO3
substrate. Coupling of modes (COM) modeling was used to find optimal design
parameters. Using the extracted design parameters, the SAW device was
fabricated. Teflon AF 2400 was used as the sensitive film because it provides high
CO2
solubility, permeability and selectivity. In wireless device testing using a
network analyzer, four sharp reflection peaks with high signal-to-noise
(S/N) ratio, small signal attenuation, and few spurious peaks were observed
in the time domain. The time positions of the reflection peaks were
well matched with the predicted values from the simulation. Infusion of
CO2 into the
chamber induced large phase shifts of the reflection peaks. Good linearity and repeatability were observed
for a CO2
concentration of 0–450 ppm. The obtained sensitivity was
1.98° ppm−1. Temperature and humidity effects were also investigated during the sensitivity evaluation
process.
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