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Optical microscope and FIB were widely used to find out defect locations in display panels. But failure analysis of LTPS TFTs is getting more difficult to detect the locations than that of (a-Si:H) TFTs. We adopted FIB and EMMI tool and found the leakage path on some special function failure such as line defect in display panel. Analysis results would help to find out defects and improve the yield by introducing right analysis method of FIB/EMMI tools in display panels.

A 440MHz wireless and passive surface acoustic wave (SAW) based chemical sensor was developed for simultaneous measurement of CO 2 gas and relative humidity (RH) using a reflective delay line pattern as the sensor element. The reflective delay line was structured by an inter-digital transducer (IDT) and several shorted grating reflectors positioned both sites of the IDTs along the SAW propagation direction. A Teflon AF 2400 film with large solubility, permeability, and selectivity towards to CO 2 and a hydrophilic SiO 2 layer for water vapor sensing are used as the sensitive film and deposited onto the piezoelectric substrate. A simulation on the SAW device was performed using the coupling of modes (COM). The measured reflection coefficient S 11 in time domain of the fabricated SAW device shows sharp reflection peaks with high signal-to-noise (S/N) ratio, small signal attenuation, and few spurious peaks. During the CO2 and humidity testing, high sensitivity (~2 o ppm -1 for CO 2 detection and 7.45 o /%RH for humidity sensing), good linearity and repeatability were observed in the CO 2 concentration of 50~400ppm and humidity of 20~80%RH. Temperature and humidity compensations were also investigated during the sensitivity evaluation process.