Fabrication of ZnO thin film based humidity sensor with fast response by sol-gel associated to spin coating method

Ghanem, Salah; Telia, A.; Boukaous, Chahra

doi:10.1109/ceit.2015.7233121

Cited by 6 publications

(7 citation statements)

References 16 publications

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“…The increase in the intensity of peak with an increase in deposition duration of the film indicates that crystallinity and grain size are enhanced with the film thickness (Chang et al, 2002). Grain size is calculated using Debye-Scherrer's formula (Salah et al, 2015), Grain size, D = kλ/β cosθ where k is called shape factor, 0.94 for ZnO, λ is the wavelength of the x-ray used, β is full width at half maximum (FWHM) of the diffraction peak in radians, θ is the Bragg's diffraction angle. 2θ and FWHM are derived from XRD result and grain size of the film is calculated using Debye-Scherrer's Formula.…”

Section: Resultsmentioning

confidence: 99%

“…Deposition of ZnO thin films has been reported on various substrates such as glass (Hoon et al, 2011;Okada et al, 2013;Alias et al, 2013;Nurulfadzilah et al, 2014;Md Sin et al, 2011;Gupta et al, 2016;Nithya and Radhakrishnan, 2012;Salah et al, 2015;Jayaraman et al, 2015;Mariappan et al, 2014;Rao and Santhoshkumar, 2009), phynox (Joshi et al, 2012;Joshi et al, 2013a;Joshi et al, 2013b), silicon (Kutepova and Hall, 1998;Xia et al, 2013;Rajan et al, 2017;Chang et al, 2002;Kang et al, 2015;Deschanvres et al, 1992), sapphire (Gorla et al, 1999;Shim et al, 2002), polyamide (Munje et al, 2017), etc., by several researchers.…”

Section: Experimental Methodsmentioning

confidence: 99%

“…Various methods such as sputtering (Hoon et al, 2011;Kutepova and Hall, 1998;Xia et al, 2013;Yoon and Kim, 2006;Rajan et al, 2017;Munje et al, 2017;Nowek et al, 2016;Okada et al, 2013;Joshi et al, 2012;Joshi et al, 2013a;Joshi et al, 2013b;Alias et al, 2013;Chang et al, 2002;Bachari et al, 1999;Kang et al, 2015), Solgel (Foo et al, 2014;Nurulfadzilah et al, 2014;Chan et al, 2016;Md Sin et al, 2011;Gupta et al, 2016;Nithya and Radhakrishnan, 2012;Salah et al, 2015), spray pyrolysis (Jayaraman et al, 2015;Mariappan et al, 2014;Rao and Santhoshkumar, 2009), metal organic chemical vapor deposition (MOCVD) (Deschanvres et al, 1992;Shi et al, 2012;Su et al, 2011;Gorla et al, 1999), plasma enhanced atomic layer deposition (PEALD) (Gong and Jackson, 2017), pulsed laser deposition (Shim et al, 2002) are widely used for the preparation of ZnO thin film. Among these, sputtering has a faster deposition rate, better adhesion to substrate and can provide high purity films (Hoon et al, 2011;Alias et al, 2013).…”

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confidence: 99%

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Study on the suitability of ZnO thin film for dynamic pressure sensing application

Suma¹,

Gaddam

Prasad³

et al. 2020

International Journal on Smart Sensing and Intelligent Systems

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ZnO thin films were prepared by RF reactive magnetron sputtering on phynox substrate at room temperature for four different thicknesses by varying deposition duration. The structural and morphological properties and composition of these films were characterized using XRD, SEM, and EDS, respectively. Suitability of these films for dynamic pressure sensing applications and the effect of film thickness on dynamic pressure sensing were evaluated experimentally using a shock tube equipment. Shock tube test results show the pure dynamic behavior of ZnO films with fast rise and discharge. Sensors with higher film thickness showed improved sensitivity which is on par with commercially available dynamic pressure sensors. This work demonstrates that the cost-effective sensors based on ZnO thin film are capable of sensing dynamic pressures for different pressure ranges.

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Section: Resultsmentioning

confidence: 99%

Section: Experimental Methodsmentioning

confidence: 99%

mentioning

confidence: 99%

See 1 more Smart Citation

Study on the suitability of ZnO thin film for dynamic pressure sensing application

Suma¹,

Gaddam

Prasad³

et al. 2020

International Journal on Smart Sensing and Intelligent Systems

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show abstract

“…Piezoelectric layer is very important in fabricating the SAW biosensor. This thin film is one of the important factors that improve the performance of the SAW device in term of sensitivity and accuracy in detection [5].…”

Section: Introductionmentioning

confidence: 99%

“…Alternately, the mechanical force will be created when electricity applied on the same material. The commonly used piezoelectric substrate materials are Quartz (SiO2), Lithium Niobate (LiNbO3), Lithium Tantalate (LiTaO3), and zinc oxide (ZnO) [4,5]. Each of them has different properties such as cost, piezoelectric coupling coefficients, attenuation, temperature sensitivities and propagation velocity.…”

Section: Introductionmentioning

confidence: 99%

Characterization of Zinc Oxide (ZnO) piezoelectric properties for Surface Acoustic Wave (SAW) device

et al. 2017

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Abstract. In fabricating Surface Acoustic Wave (SAW) biosensors device, the substrate is one of important factors that affected to performance device. there are many types of piezoelectric substrate in the markets and the cheapest is zinc Oxide substrate. Zinc Oxide (ZnO) with its unique properties can be used as piezoelectric substrate along with SAW devices for detection of DNA in this research. In this project, ZnO thin film is deposited onto silicon oxide substrate using electron beam evaporation (E-beam) and SolGel technique. Different material structure is used to compare the roughness and best piezoelectric substrate of ZnO thin film. Two different structures of ZnO target which are pellet and granular are used for e-beam deposition and one sol-gel liquid were synthesize and compared. Parameter for thickness of ZnO e-beam deposition is fixed to a 0.1kÅ for both materials structure and sol-gel was coat using spin coat technique. After the process is done, samples are annealed at temperature of 500C for 2 hours. The structural properties of effect of post annealing using different material structure of ZnO are studied using Atomic Force Microscopic (AFM) for surface morphology and X-ray Diffraction (XRD) for phase structure.

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Glass and Glass–Ceramic Photonic Materials for Sensors

Giardino

Pugliese

Janner

2021

PoliTO Springer Series

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Recent developments in sensors are pushing for optimized materials that can increase their usage, bolster their sensitivity and enable new and more efficient transduction mechanisms. We hereby review some of the most relevant applications of glasses and glass-ceramics for photonic sensors considering the recent trends and innovative approaches. This review covers from bulk glasses to thin films and from fiber optics to nanocrystal-based and their applications in sensing.

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Fabrication of ZnO thin film based humidity sensor with fast response by sol-gel associated to spin coating method

Cited by 6 publications

References 16 publications

Study on the suitability of ZnO thin film for dynamic pressure sensing application

Study on the suitability of ZnO thin film for dynamic pressure sensing application

Characterization of Zinc Oxide (ZnO) piezoelectric properties for Surface Acoustic Wave (SAW) device

Glass and Glass–Ceramic Photonic Materials for Sensors

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