Fabry-Perot diaphragm fiber-optic sensor

Chin, Ken K.; Sun, Yonghe; Feng, G.; Georgiou, G.; Guo, Kangzhu; Niver, Edip; Roman, Harry T.; Noe, Karen

doi:10.1364/ao.46.007614

Cited by 48 publications

(29 citation statements)

References 9 publications

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“…Several EFPI-based configurations have been recently presented [21][22][23][24][25][26][27][28]; in addition, EFPI-based medical devices are commercially available [29]. It is possible to combine an EFPI probe with a fiber Bragg grating (FBG) [30,31], acting as temperature sensor in proximity of the EFPI sensor, to provide a dual sensing with cross compensation; such configuration has been proposed in [26][27][28].…”

Section: Introductionmentioning

confidence: 99%

Fiber-optic combined FPI/FBG sensors for monitoring of radiofrequency thermal ablation of liver tumors: ex vivo experiments

et al. 2014

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We present a biocompatible, all-glass, 0.2 mm diameter, fiber-optic probe that combines an extrinsic Fabry-Perot interferometry and a proximal fiber Bragg grating sensor; the probe enables dual pressure and temperature measurement on an active 4 mm length, with 40 Pa and 0.2°C nominal accuracy. The sensing system has been applied to monitor online the radiofrequency thermal ablation of tumors in liver tissue. Preliminary experiments have been performed in a reference chamber with uniform heating; further experiments have been carried out on ex vivo porcine liver, which allowed the measurement of a steep temperature gradient and monitoring of the local pressure increase during the ablation procedure.

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Section: Introductionmentioning

confidence: 99%

Fiber-optic combined FPI/FBG sensors for monitoring of radiofrequency thermal ablation of liver tumors: ex vivo experiments

et al. 2014

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“…1). Because the reflected beams all originate from the same incident beam, the reflected fields sum coherently [19]:…”

Section: Fabry-pérot Interferometermentioning

confidence: 99%

Single-Crystal Silicon Photonic-Crystal Fiber-Tip Pressure Sensors

Jan

Solgaard

2015

J. Microelectromech. Syst.

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The combination of high-mechanical flexibility and high-optical reflectivity makes planar photonic crystal diaphragms excellent mirrors for optical resonators used in fiber-optic pressure sensing. We have developed a standard silicon process to construct a monolithic photonic crystal-based crystalline silicon membrane. We report on three photonic crystal pressure sensors with different compliances, and discuss the following figures of merit: 1) spectral shift sensitivity; 2) optical sensitivity; 3) pressure sensitivity; 4) resolution; and 5) dynamic range. When compared with a sensor made with an oxide diaphragm, each of our sensors is at least an order of magnitude more sensitive, with a spectral shift sensitivity magnitude of up to 8.6 nm/kPa. We show that the fabrication can be tailored to optimize figures of merit depending on the needs of the application.[ 2014-0151]Index Terms-Pressure sensor, Fabry-Pérot, fiber optic sensing, photonic crystal diaphragm.

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“…Zhou et al stated that since the cavity is circular in shape, the pressure sensing diaphragm is modeled as a circular membrane [14]. The deflection of the diaphragm due to the application of pressure, P is given by [4][5][6][7][8][9][10][11][12] E q .…”

Section: A Diaphragm Thickness Calculationmentioning

confidence: 99%

A New Diaphragm Material for Optical Fibre Fabry-Perot Pressure Sensor

Said

Radzi

Noh

et al. 2009

2009 Fifth International Conference on MEMS NANO, and Smart Systems

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Fibre optic Fabry-Perot interferometric pressure sensors have proved many orders of excellent measurements system, but they suffer from limitations in sensitivity and resolution caused by the trade-off in designing the sensor when very thin diaphragm is needed. By reducing the diaphragm thickness increases the deflection range, but reduces the diaphragm strength and therefore increases the risk of mechanical failure. The pressure sensor has been designed and its fabrication process using MEMS techniques is explained. This paper proposes a new diaphragm material for the fibre optic Fabry-Perot pressure sensor. Using a Polydimethylsiloxane (PDMS), the limitation on sensor resolution and sensitivity are overcome. The goal of this research is to design and analyze the PDMS diaphragm to enhance the consistency and sustainability of fibre optic FabryPerot pressure sensor for medical measurements which require a minimum resolution of ~1 mmHg over all the physiological pressure range (~300 mmHg) [1,2]. Comparisons of theoretical and simulation with Coventor Ware simulator on mechanical part of the pressure sensor are made. Also, an explanation viewing the sensor's diaphragm stability is provided.

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Fabry-Perot diaphragm fiber-optic sensor

Cited by 48 publications

References 9 publications

Fiber-optic combined FPI/FBG sensors for monitoring of radiofrequency thermal ablation of liver tumors: ex vivo experiments

Fiber-optic combined FPI/FBG sensors for monitoring of radiofrequency thermal ablation of liver tumors: ex vivo experiments

Single-Crystal Silicon Photonic-Crystal Fiber-Tip Pressure Sensors

A New Diaphragm Material for Optical Fibre Fabry-Perot Pressure Sensor

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