2020
DOI: 10.1038/s41598-020-65990-2
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Facile large-area uniform photolithography of membrane diffractive lens based on vacuum assisted self contact method

Abstract: Optical polyimide (PI) membrane is a promising substrate material for diffractive lens applied in future large-aperture space based imaging system because of its light weight, environmental adaptability and deployable feature. In this letter, we put forward a facile large-area uniform photolithography technique using vacuum assisted self contact method to fabricate large-aperture membrane diffractive lens. We fabricated a φ 400 mm aperture membrane off-axis 2-levels Fresnel Zone Lens (FZL) based on the method … Show more

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Cited by 2 publications
(2 citation statements)
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“…Wang et al developed a 300mm aperture diffraction imaging system and conducted relevant imaging performance experiment (Figure 5) [11]. Gao et al proposed a large-area uniform photolithography technique to manufacture diffractive membrane lens with the average diffraction efficiency over 36.6% [12]. Figure 5.…”
Section: Diffractive Membrane Imaging Technologymentioning
confidence: 99%
“…Wang et al developed a 300mm aperture diffraction imaging system and conducted relevant imaging performance experiment (Figure 5) [11]. Gao et al proposed a large-area uniform photolithography technique to manufacture diffractive membrane lens with the average diffraction efficiency over 36.6% [12]. Figure 5.…”
Section: Diffractive Membrane Imaging Technologymentioning
confidence: 99%
“…Traditional pose measurement techniques usually adopt multiple sets of measuring equipment and sensors, which are complicated in structure and require high installation accuracy [ 16 , 17 , 18 ]. It is difficult to meet the pose measurement requirements of the primary lens of a large aperture transmission space telescope, and the calculation process is relatively cumbersome [ 19 , 20 , 21 ].…”
Section: Introductionmentioning
confidence: 99%