Encyclopedia of Analytical Chemistry 2013
DOI: 10.1002/9780470027318.a9279
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Far‐Ultraviolet ( FUV ) Spectroscopy in the Solid and Liquid States, Principle, Instrumentation, and Application of

Abstract: This article outlines recent progress in ultraviolet (UV) spectroscopy in the 140–280 nm region of solid and liquid phases. In this article, we refer to the 120–200 nm region as the far‐UV (FUV) region. The word ‘vacuum UV region’ is not appropriate any more at least for the 120–200 nm region because most of recent spectrometers used in this region do not have the vacuum evaporation system but have the nitrogen gas purged system. FUV spectroscopy is concerned with electronic transitions of a molecule, but the … Show more

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Cited by 3 publications
(3 citation statements)
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“…VUV spectral region covers wavelengths which are of interest for two main research applications: (i) development of UV optics for excimer lasers and photolithography [7,8], (ii) material science (diamond, polymer thin films) [4][5][6]. Construction of a transmission spectrometer in this spectral range is indispensable for carrying out the research in the two topical directions.…”
Section: Research Objectivesmentioning
confidence: 99%
See 1 more Smart Citation
“…VUV spectral region covers wavelengths which are of interest for two main research applications: (i) development of UV optics for excimer lasers and photolithography [7,8], (ii) material science (diamond, polymer thin films) [4][5][6]. Construction of a transmission spectrometer in this spectral range is indispensable for carrying out the research in the two topical directions.…”
Section: Research Objectivesmentioning
confidence: 99%
“…A number of spectral features of interest are present in the ultraviolet (UV) part of spectra or even in the so-called vacuum UV (VUV) region with wavelengths below 190 nm [4][5][6]. This term is used due to the necessity to carry out the measurements in vacuum, since air very strongly absorbs the light in this spectral region.…”
Section: Introductionmentioning
confidence: 99%
“…also faces interference caused by ultraviolet attenuation. Specifically, UV light with a wavelength lower than 240 nm is easily absorbed by oxygen in the air along the optical transmission path, resulting in attenuation of light intensity that is not attributable to the sample absorption [ 33 , 34 ]. Wang et al pointed out the extent of the absorption of ultraviolet light by different concentrations of oxygen in the environment [ 35 ].…”
Section: Introductionmentioning
confidence: 99%