1996
DOI: 10.1007/s003390050354
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Fast etching and metallization of SiC ceramics with copper-vapor-laser radiation

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Cited by 5 publications
(12 citation statements)
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“…In the meantime, pulses need to be short (in μs or ns) and their frequency low (< kHz) in order to achieve high ablation rate. The authors of [119] perceived high ablation in water than in air for SiC at laser beam dia of 20 μm, pulse duration of 15 ns, fluence level of 16 J/cm 2 . However, they used a repetition rate of 8 kHz which is contradictory for high ablation rate as mentioned before.…”
Section: High Ablation Ratementioning
confidence: 99%
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“…In the meantime, pulses need to be short (in μs or ns) and their frequency low (< kHz) in order to achieve high ablation rate. The authors of [119] perceived high ablation in water than in air for SiC at laser beam dia of 20 μm, pulse duration of 15 ns, fluence level of 16 J/cm 2 . However, they used a repetition rate of 8 kHz which is contradictory for high ablation rate as mentioned before.…”
Section: High Ablation Ratementioning
confidence: 99%
“…High proportion of energy is absorbed by thick water film and thus attenuates the amount of energy to be absorbed by work material leading to less ablation efficiency [118]. Typical water layer thickness in horizontal position is 1-2 mm [119], however, different authors experienced different thickness values like [120] maintained 6 mm layer, [121] and [122] worked at 1-20 mm layer. Similarly, to ensure handful rise of ablation rate, [117] suggested 3-4 mm layer thickness for alumina.…”
Section: Water Layer Thicknessmentioning
confidence: 99%
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“…However, in this route, most of the researchers opted different machining conditions (dry conditions, pressurized gaseous conditions, and wet conditions by H 2 O, H 2 O 2 , C 2 H 5 OH, C 2 H 4 Cl 2 , etc. [19][20][21]) and mostly present the results in the form of comparison. For example, a comparison on the surface and structural properties achieved after laser ablation under different environments can be touched in Ali et al [22] where the research team applied KrF Excimer laser on titanium alloy.…”
Section: Introductionmentioning
confidence: 99%