2013
DOI: 10.1088/0957-4484/24/13/135501
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Fast nanotopography imaging using a high speed cantilever with integrated heater–thermometer

Abstract: This paper presents a high speed tapping cantilever with an integrated heater-thermometer for fast nanotopography imaging. The cantilever is much smaller and faster than previous heated cantilevers, with a length of 35 μm and a resonant frequency of 1.4 MHz. The mechanical response time is characterized by scanning over a backward-facing step of height 20 nm. The mechanical response time is 77 μs in air and 448 μs in water, which compares favorably to the fastest commercial cantilevers that do not have integra… Show more

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Cited by 6 publications
(9 citation statements)
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“…Scanning probe techniques play an important role in understanding nanoscale energy conversion and transport. [1][2][3][4] Specifically, scanning thermal microscopy (SThM) has been widely used for local measurements of temperature fields, [5][6][7][8][9][10][11][12][13][14][15][16] thermal conductivity, [17][18][19] thermopower, 20,21 atomic-scale heat dissipation, 3 and even nanoscale thermal lithography. 22,23 In all SThM techniques, a temperature sensor (thermocouple or resistance-based thermometer), which can measure local temperatures and/or generate local heating, is integrated into the probe.…”
mentioning
confidence: 99%
“…Scanning probe techniques play an important role in understanding nanoscale energy conversion and transport. [1][2][3][4] Specifically, scanning thermal microscopy (SThM) has been widely used for local measurements of temperature fields, [5][6][7][8][9][10][11][12][13][14][15][16] thermal conductivity, [17][18][19] thermopower, 20,21 atomic-scale heat dissipation, 3 and even nanoscale thermal lithography. 22,23 In all SThM techniques, a temperature sensor (thermocouple or resistance-based thermometer), which can measure local temperatures and/or generate local heating, is integrated into the probe.…”
mentioning
confidence: 99%
“…172 Details of etching, deposition, and doping fabrication procedures can be reviewed here. [165][166][167] Formerly used solely for data storage and writing, 173 heated AFM cantilevers have since gone through a recent renaissance due to the extensive efforts of the King group, 168,174 who systematically calibrated cantilever heater operation to enable an advanced thermal characterization suite, including thermomechanical data writing, 175 nanoscale solid ink deposition, 176 thermo-mechano-chemical analysis, 177 thermal topographic imaging, [178][179][180] frictional control, 181 and temperature-dependent contact potential measurements. 182 Fig.…”
Section: Heated Microcantileversmentioning
confidence: 99%
“…On the contrary, the direct method is a top-down approach wherein tips are formed by micromachining the tip material under an etch mask by dry or wet etching. [8] Dry etching is an expensive technique that requires sophisticated apparatus, [9] whereas the wet etch method uses low-cost chemicals such as tetramethylammonium hydroxide (TMAH), potassium hydroxide (KOH), and hydrofluoric acid, nitric acid, and acetic acid (HNA), [10][11][12] making it a powerful alternative to the dry etch process.…”
Section: Introductionmentioning
confidence: 99%