Fast-Response and Low-Hysteresis Flexible Pressure Sensor Based on Silicon Nanowires

Preparation of high-purity straight silicon nanowires by molten salt electrolysis

“…Silicon nanowire (SiNW), which is a typical of one-dimensional semiconductor nanomaterial, can play important roles in nanoelectronic devices [1] , biochemical sensors [2,3] , and lithium-ion batteries (LIBs) [4,5] . In past decades, it has been reported that SiNWs can facilitate axial charge transfer and shorten radial Li + diffusion distance due to their one-dimensional characteristics, and are thus considered to be an interesting and promising new negative electrode material for LIBs.…”

Flexible Sensors—From Materials to Applications

“…Si has been implemented in flexible sensors in the form of amorphous-Silicon (a-Si) [26,[204][205][206], polycrystalline silicon [27,28,[207][208][209][210][211][212][213], Si nanowires (SiNWs) [214][215][216], and crystalline silicon nanomembranes (SiNMs) [30,31,72,[217][218][219][220][221][222][223]. Amorphous silicon was largely employed as the active material on LCD matrices, and later transitioned for flexible sensors as a strain sensitive layer [206], semiconductor on on-site signal processing circuits [205], or as part of X-ray photodetectors [26,204].…”

“…The various approaches in fabricating pressure sensors include resistive types [7,21,39,70,95,104,127,136,208,296,[413][414][415][416][417][418][419][420][421][422][423], capacitive types [25,71,146,303,310,321,352,[424][425][426][427], field-effect transistors [9][10][11]193,428], and the piezocapacitive and piezoelectric properties of materials [214,[429][430][431]. Pressure sensors' most important parameters are sensitivity, detection range and response time.…”

“…Silicon nanowires (SiNWs) were employed for their piezocapacitive properties to build a pressure sensor on a PET substrate with Al/ITO electrodes [214]. This sensor achieved better sensitivity values at low-pressure regions with 821 %/kPa for an applied pressure of 0.1 kPa, and 412 %/kPa for an applied pressure of 1 kPa.…”

Advanced Wearable Microfluidic Sensors for Healthcare Monitoring

“…In the foreseeable future, wearable electronics are anticipated to play important roles in personal healthcare, medical diagnosis, and athletic monitoring because of advantages such as portability, conformal wearability, and the instantaneous delivery of sensory information to individuals . Analysis based on body fluids (e.g., sweat, saliva, and tears) is one of the most precise diagnostic methods.…”