2013
DOI: 10.1109/jmems.2012.2212422
|View full text |Cite
|
Sign up to set email alerts
|

Fatigue Degradation Properties of LIGA Ni Films Using Kilohertz Microresonators

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

2
30
0

Year Published

2017
2017
2023
2023

Publication Types

Select...
9
1

Relationship

2
8

Authors

Journals

citations
Cited by 26 publications
(32 citation statements)
references
References 33 publications
2
30
0
Order By: Relevance
“…The mechanical monotonic tensile properties have been previously measured using microtensile tests of dog bone shaped specimens [33]: the 0.2% yield stress is ∼650±70…”
Section: Microresonator Experimental Setup: Measurement Of Fatigue Crack Initiation Lifementioning
confidence: 99%
“…The mechanical monotonic tensile properties have been previously measured using microtensile tests of dog bone shaped specimens [33]: the 0.2% yield stress is ∼650±70…”
Section: Microresonator Experimental Setup: Measurement Of Fatigue Crack Initiation Lifementioning
confidence: 99%
“…Fig. 9(b) denotes clear ridge shapes with height of 555.1 nm originated from the stretching strain in FeCo thin-film after multi-testing, and this leads to fall off and cracks of the thin-film [24], [25]. The Cr thin-film has altered thing somewhat.…”
Section: Fatigue Analysis Of Feco Thin-film Coated Devicesmentioning
confidence: 99%
“…We consider the micro-resonator technique developed by Pierron and co-workers [17] , which applies cyclic loading to a cantilever micro-beam under fully reversed loading (Fig. 1).…”
Section: Micro-beam Fatigue Damagementioning
confidence: 99%