The article presents mathematical models of thermal processes of combined methods of electromechanical processing, which are based on the heat conduction equations, which take into account thermophysical properties (thermal diffusivity, heat capacity, thermal conductivity and heat transfer), initial and boundary conditions, technological and other features of the studied processing methods. In view of the fact that electromechanical processing (EMT) is characterized by a process with a volumetric heat release zone, with sufficiently small dimensions and high intensity, it is assumed that the determination of temperature fields can be carried out using the superposition principle. In this case, the main factors affecting the amount of heat propagating into the contacting bodies are the intensity of heat removal, the thermophysical properties of the contacting bodies, and the speed of their relative movement. Dependences are proposed that allow one to describe the temperature fields in the volumes of parts subjected to thermal deformation during electromechanical processing, which have significant geometric parameters that ensure sufficient heat removal from the treated surfaces into the part. It has been established that in the case of processing parts of small dimensions, with insignificant heat removal, it becomes necessary to take into account the accumulation of heat, which will lead to a general increase in temperature in the technological system during processing, and a decrease in the efficiency of the hardening process. The derived mathematical dependencies in the form of heat conduction equations with the established restrictions make it possible to determine the parameters of thermal fields during electromechanical processing in the system “working tool” - “local microvolume of the surface layer”, while these presented mathematical relationships are presented in a linear formulation with thermophysical coefficients. It has been theoretically established and experimentally confirmed that in the process of processing the main factors affecting the amount of heat propagating into the contacting bodies are the intensity of heat removal, the thermophysical properties of the contacting bodies, and the speed of their relative movement. The performed experimental studies have confirmed the adequacy of the mathematical dependencies used to calculate the temperatures in the local microvolumes of the treated surface layer.